Cyclonic atmospheric pressure plasma is developed to synthesize the organosilicon nano-coating on 316 L stainless steel surface with hexamethyldisilazane (HMDSN) and HMDSN/N 2 monomers. The modified 316 L stainless steel surface characteristics of cyclonic plasma deposited organosilicon nano-coating were evaluated by the static contact angle measurement, FTIR, SEM, AFM, and XPS detections. The chemical analysis with FTIR and XPS depicts that cyclonic plasma deposited nanocoating obtains the relatively inorganic characteristics. The surface morphological determination with SEM and AFM refers cyclonic plasma deposited 316 L stainless steel surface roughness alteration with switching monomer inputs. This study shows the potential of chamber-less deposition to create the plasma deposited organosilicon nano-coating for 316 L stainless.