Laser-stimulated etching of n-GaAs in aqueous solutions

Etch Stop Techniques for Micromachining

“…Holes as small as 10 m in diam and 500 m deep are possible. Laser-or photo-assisted etching has been studied and used for III- [136][137][138][139] ' SiC, 140 and silicon,'41"42 semiconductors as well as in the selective etching of glasses. "'8 III.…”