Laser scribing of polycrystalline thin films

Compaan, A.; Matulionis, Ilvydas; Nakade, S.

doi:10.1016/s0143-8166(00)00061-0

Cited by 143 publications

(75 citation statements)

References 10 publications

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“…(1)] of about 300 nm with D estimated from thermal conductivity, density, and specific heat values. 11,90 Therefore, only the near surface region of the CI(G)Se film is affected by the laser energy, with the film bulk remaining unaltered (see Fig. 3).…”

Section: Pulsed Laser Annealingmentioning

confidence: 99%

“…These applications have recently been reviewed in the literature. 7,8 In thin film photovoltaics (PV), lasers have been used for the recrystallization of amorphous Si into polycrystalline Si 9,10 and scribing for the monolithic cell integration of CdTe 11 and CuðIn; GaÞðS; SeÞ 2 (CIGS) 11,12 cells. The aim of this paper is to review laser-based processes for synthesizing and or improving the properties of the chalcogenide absorber layers used in thin film solar cells, namely CdTe and Cu(In, Ga)S(Se).…”

Section: Introductionmentioning

confidence: 99%

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Laser processing for thin film chalcogenide photovoltaics: a review and prospectus

et al. 2015

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Abstract. We review prior and on-going works in using laser annealing (LA) techniques in the development of chalcogenide-based [CdTe and CuðIn; GaÞðS; SeÞ 2 ] solar cells. LA can achieve unique processing regimes as the wavelength and pulse duration can be chosen to selectively heat particular layers of a thin film solar cell or even particular regions within a single layer. Pulsed LA, in particular, can achieve non-steady-state conditions that allow for stoichiometry control by preferential evaporation, which has been utilized in CdTe solar cells to create Ohmic back contacts. Pulsed lasers have also been used with CuðIn; GaÞðS; SeÞ 2 to improve device performance by surface-defect annealing as well as bulk deep-defect annealing. Continuouswave LA shows promise for use as a replacement for furnace annealing as it almost instantaneously supplies heat to the absorbing film without wasting time or energy to bring the much thicker substrate to temperature. Optimizing and utilizing such a technology would allow production lines to increase throughput and thus manufacturing capacity. Lasers have also been used to create potentially low-cost chalcogenide thin films from precursors, which is also reviewed. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Section: Pulsed Laser Annealingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Laser processing for thin film chalcogenide photovoltaics: a review and prospectus

et al. 2015

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“…The layers are numbered in the order in which they are deposited. They are micromachined by laser ablation, an established material removal process that has been extensively studied in literature [8,16]. For this purpose, a short (ns) or ultrashort (ps or fs) pulsed laser beam is focused on the substrate.…”

Section: Laser Scribingmentioning

confidence: 99%

Laser applications in thin-film photovoltaics

et al. 2010

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We review laser applications in thin-film photovoltaics (thin-film Si, CdTe, and Cu(In,Ga)Se 2 solar cells). Lasers are applied in this growing field to manufacture modules, to monitor Si deposition processes, and to characterize opto-electrical properties of thin films. Unlike traditional panels based on crystalline silicon wafers, the individual cells of a thin-film photovoltaic module can be serially interconnected by laser scribing during fabrication. Laser scribing applications are described in detail, while other laserbased fabrication processes, such as laser-induced crystallization and pulsed laser deposition, are briefly reviewed. Lasers are also integrated into various diagnostic tools to analyze the composition of chemical vapors during deposition of Si thin films. Silane (SiH 4 ), silane radicals (SiH 3 , SiH 2 , SiH, Si), and Si nanoparticles have all been monitored inside chemical vapor deposition systems. Finally, we review various thin-film characterization methods, in which lasers are implemented.

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“…The mechanisms responsible for the improvement of soft magnetic properties include magnetic domain refinement, stress relaxation, and inhibition of domain-wall movement [10]. The commercially available laser scribing systems have been optimized typically for other applications and other materials such as scribing of crystalline Si, resistor trimming, or circuit repair [11,12]. In contrast to laser welding [13] or surface alloying by laser melt deposition [14], the laser * corresponding author; e-mail: vpuchy@saske.sk scribing may apply only a very low input power (e.g.…”

Section: Introductionmentioning

confidence: 99%

The Influence of Fiber Laser Pulse Processing on Coercivity and Nanohardness of Fe-3.2Si Grain-Oriented Electrical Steel in relation with its Surface Changes and Magnetic Domains Modifications

et al. 2017

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Fiber laser scribing of Fe-3.2Si grain-oriented electrical steel was carried out using three different laser pulse regimes, namely a single pulse laser regime, multipulse laser regime and multipulse laser regime with modulation of laser pulses. The samples were tested for coercivity and nanohardness before and after laser processing. Clear improvements in soft magnetic characteristics were observed for all the regimes using the lowest single pulse energy of 0.6 mJ. The best improvement i.e. the most significant decrease in coercivity was obtained after the regime with 5 pulses. Further increasing in both pulse energy and pulse number resulted only in detrimental effects on both magnetic and mechanical characteristics. Introduction of 50 kHz pulse modulation within 100-pulse laser regimes resulted in lower coercivity values in comparison with the same regimes without modulation. The major effects responsible for the observed improvement are related to optimal refinement and rearrangement of magnetic domains determined by the balance of laser-induced residual stresses and plastic deformation at the surface of the treated material. Thus the fiber laser pulse processing has been recognised as a useful and energy efficient tool in obtaining electrical steels for power transformers with lower core losses.

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Laser scribing of polycrystalline thin films

Cited by 143 publications

References 10 publications

Laser processing for thin film chalcogenide photovoltaics: a review and prospectus

Laser processing for thin film chalcogenide photovoltaics: a review and prospectus

Laser applications in thin-film photovoltaics

The Influence of Fiber Laser Pulse Processing on Coercivity and Nanohardness of Fe-3.2Si Grain-Oriented Electrical Steel in relation with its Surface Changes and Magnetic Domains Modifications

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