Wafer Scale Integration 1989
DOI: 10.1007/978-1-4613-1621-3_7
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Laser Restructurable Technology and Design

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Cited by 28 publications
(12 citation statements)
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“…The important advantage of laser linking over transistor switches is that the result is permanent and of lower impedance than the bidirectional transistor switches[l3]. Laser link defect avoidance has built fully operational Wafer scale circuits in 6 different designs applied to DSP filter and speech recognition systems [3,4], These were packaged using large multichip module type metal packages.…”
Section: Laser Link Defect Avoidancementioning
confidence: 99%
See 1 more Smart Citation
“…The important advantage of laser linking over transistor switches is that the result is permanent and of lower impedance than the bidirectional transistor switches[l3]. Laser link defect avoidance has built fully operational Wafer scale circuits in 6 different designs applied to DSP filter and speech recognition systems [3,4], These were packaged using large multichip module type metal packages.…”
Section: Laser Link Defect Avoidancementioning
confidence: 99%
“…In commercial devices, such as DRAM's with areas of about 15x15 mm, this has lead to significantly enhanced yields. In more experimental applications laser defect avoidance has expanded usable silicon real estate into Wafer Scale Integration (WSI) device areas 25 square centimeters [3] [4].…”
Section: Introductionmentioning
confidence: 99%
“…Specifically, this means the ability to integrate laser restructurable elements with standard CMOS processing [3,6]. Diffused links [6,7], which involve conduction through the silicon, have been used for some time to achieve this compatibility goal.…”
Section: Introductionmentioning
confidence: 99%
“…Specifically, this means the ability to integrate laser restructurable elements with standard CMOS processing [3,6]. Diffused links [6,7], which involve conduction through the silicon, have been used for some time to achieve this compatibility goal. More recently, direct metal-to-metal connections were made on structures fabricated with standard CMOS processing [8] where links were formed when a laser was focussed on the metal 1 through an annular region of metal 2, but the linking yield was never shown to be better than 99%.…”
Section: Introductionmentioning
confidence: 99%
“…Six RVLSI systems have been built on three different wafer designs [2] with the largest one having 405K functional transistors. One Integmtor wafer has been operating in a bench tester for 4 1/2 years without failure.…”
Section: K R O T a T I O N Smentioning
confidence: 99%