Laser-produced plasma soft x-ray source based on an aerosol target

Abstract

Laser produced plasma (LPP) soft x-ray and extreme ultraviolet sources utilize various types of targets. Some of them are based on gaseous targets. The most important disadvantage of such targets is the very limited number of elements that can be used in the gaseous form under normal conditions, including chemical compounds in the gaseous state. In this paper, the authors propose a new type of target, constituting an extension of the gaseous target, namely aerosol target, based on solutions of solid chemical compounds in liquids. Unlike previous attempts to produce aerosol targets from overheated liquids, in our system, the target is created by injection of a mist, preformed in a dedicated cell, into the vacuum chamber. Such targets have many advantages: the emission spectra can be adjusted by choosing proper chemical compounds, the aerosol target is elongated, hence, the laser focus can be positioned at a relatively long distance from the nozzle outlet, its average density can be higher compared to gaseous targets. In this work, such a target and its usefulness for the LPP soft x-ray source was demonstrated. The target was investigated by the soft x-ray backlighting method. Its density distribution at the position of the laser focus was determined. The emission spectra from the soft x-ray range, corresponding to multiple charged ions, originating from the solvent and the diluted salt were measured. Based on numerical simulations of the spectra, an ionic composition of the resulting plasmas was determined.

EUV Radiation in the Range of 10–20 nm from Liquid Spray Targets Containing O, Cl, Br and I Atoms under Pulsed Laser Excitation

“…There are several types of liquid targets: constant flow jets [1], cryogenic liquid jets [2,3], droplet targets [4], and spray targets [5,6]. When using constant flow systems, it is necessary to use capillaries of a small cross-section to minimize the cost of consumables.…”