Laser polymerization-based novel lift-off technique

Bhuian, B.; Winfield, Richard Dien; Crean, G.M.

doi:10.1016/j.apsusc.2008.07.106

“…As in all lithography techniques, the manufactured patterns can be transferred to other materials or substrates as well as sputtered with metal or semiconductor thin layers or removed applying lift-off method [95].…”

Section: Nanogratingsmentioning

confidence: 99%

Nanophotonic lithography: a versatile tool for manufacturing functional three-dimensional micro-/nano-objects

Malinauskas¹,

Kiršanskė²,

Rekštytė³

et al. 2012

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In this paper, an overview of literature supported by original experimental results on direct laser polymerization of three-dimensional micro-/nano-structuring of various photopolymers is presented. Alternative technologies, principles of threshold based direct laser writing in polymers employing ultrafast lasers, issues of optimization of the laser structuring parameters for increasing fabrication resolution and production throughput are presented and discussed. Examples of woodpile templates and nanogratings are shown as well as an opto-fluidic sensor design for usage in lab-on-chip type devices is demonstrated and its performance is characterized. Additionally, a possibility to produce a three-dimensional electric circuit is introduced.

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Accurate position measurement of a high-density beam spot array in digital maskless lithography

Kang

¹

,

Kang

²

,

Hahn

³

2013

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Since patterns in digital maskless lithography are formed by accumulating the exposure energy of a high-density beam spot array, the accurate position measurement of the spot array is essential for the precise operation of the system. We propose a measurement technique for detecting the position of a high-density, subpixel size beam spot array with a charge-coupled device (CCD). In order to determine the position of each beam spot with a small number of CCD pixels, we assign 3×3 pixels of the CCD for each spot and scan the CCD to determine the signal of a center pixel. We numerically analyze the measurement uncertainty in the pixel position for various scanning conditions. We set up an experimental system for proof of concept and to detect the position of a 10×10 beam spot array with an uncertainty less than 100 nm. Additionally, the measurement uncertainty quantitatively matches the numerical analysis results.

show abstract

Nanophotonic lithography: a versatile tool for manufacturing functional three-dimensional micro-/nano-objects

Malinauskas¹,

Kiršanskė²,

Rekštytė³

et al. 2012

View full text Add to dashboard Cite

In this paper, an overview of literature supported by original experimental results on direct laser polymerization of three-dimensional micro-/nano-structuring of various photopolymers is presented. Alternative technologies, principles of threshold based direct laser writing in polymers employing ultrafast lasers, issues of optimization of the laser structuring parameters for increasing fabrication resolution and production throughput are presented and discussed. Examples of woodpile templates and nanogratings are shown as well as an opto-fluidic sensor design for usage in lab-on-chip type devices is demonstrated and its performance is characterized. Additionally, a possibility to produce a three-dimensional electric circuit is introduced.

show abstract

Laser polymerization-based novel lift-off technique

Cited by 3 publications

References 15 publications

Nanophotonic lithography: a versatile tool for manufacturing functional three-dimensional micro-/nano-objects

Nanophotonic lithography: a versatile tool for manufacturing functional three-dimensional micro-/nano-objects

Accurate position measurement of a high-density beam spot array in digital maskless lithography

Nanophotonic lithography: a versatile tool for manufacturing functional three-dimensional micro-/nano-objects

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