Laser Polarimetric Imaging of Surface Defects of Semiconductor Wafers, Microelectronics, and Spacecraft Structures

Giakos, G.C.; Medithe, A.; Sumrain, S.; Sukumar, S.; Fraiwan, Luay; Orozco, A.

doi:10.1109/tim.2006.884110

Cited by 5 publications

(2 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Ultra-precision industrial components have been widely used in aerospace, national defense, biomedicine, communication, microelectronics and other high-tech fields [ 1 , 2 , 3 , 4 , 5 , 6 , 7 ], which require high-precision surface profiles. Accurate measurement of curved surface profiles is beneficial for the quality check (QC) of cylindrical components and further influences the reliability of the equipment involving these cylindrical components.…”

Section: Introductionmentioning

confidence: 99%

A High-Precision Multi-Beam Optical Measurement Method for Cylindrical Surface Profile

Zhou

Cai

et al. 2023

Micromachines

View full text Add to dashboard Cite

To automatically measure the surface profile of a cylindrical workpiece, a high-precision multi-beam optical method is proposed in this paper. First, some successive images for the cylindrical workpiece’s surface are acquired by a multi-beam angle sensor under different light directions. Then, the light directions are estimated based on the feature regions in the images to calculate surface normal vectors. Finally, according to the relationship of the surface normal vector and the vertical section of the workpiece’s surface, a depth map is reconstructed to achieve the curvature surface, which can be employed to measure the curvature radius of the cylindrical workpiece’s surface. Experimental results indicate that the proposed measurement method can achieve good measurement precision with a mean error of the curvature radius of a workpiece’s surface of 0.89% at a reasonable speed of 10.226 s, which is superior to some existing methods.

show abstract

Section: Introductionmentioning

confidence: 99%

A High-Precision Multi-Beam Optical Measurement Method for Cylindrical Surface Profile

Zhou

Cai

et al. 2023

Micromachines

View full text Add to dashboard Cite

show abstract

“…Polarized light metrology can be used for many applications to perform non-contact, non-destructive, and fast measurements, e. g. in the semiconductor industry for wafer inspection [1], in tissue characterization [2,3], chemistry [4], biomedical diagnosis [5] or more. A full Stokes-polarimeter measures all four terms of the Stokes vector:…”

Section: Introductionmentioning

confidence: 99%