Laser Micromachining

Klotzbach, Udo; Lasagni, Andrés Fabían; Panzner, Michael; Franke, Volker

doi:10.1007/978-3-642-17782-8_2

Cited by 17 publications

(3 citation statements)

References 4 publications

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“…To minimize the thermal effects such as melting and burr formation, extremely short pulse durations (nano or pico or even femtosecond), wide range of wavelengths and repetition rates (from single pulse to Megahertz) are used during laser micromachining thus eliminating the need for any post processing measures (Lasagni and Lasagni 2011). Laser micromachining has been widely used in microelectronics, aerospace, biomedical and other higher-precision applications.…”

Section: Laser Beam Microdrillingmentioning

confidence: 99%

Lasers Based Manufacturing

Joshi¹,

Dixit²

2015

Topics in Mining, Metallurgy and Materials Engineering

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Section: Laser Beam Microdrillingmentioning

confidence: 99%

Lasers Based Manufacturing

Joshi¹,

Dixit²

2015

Topics in Mining, Metallurgy and Materials Engineering

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“…Laser micromachining [2] Process are soaring in the recent days and its potential merits add a significant impact in its application areas. Its high beam quality, portable installation size, high laser efficiency, affordable price, easy to incorporate in the system.…”

Section: Laser Micromachining Processmentioning

confidence: 99%

Micromachining process – current situation and challenges

Lalakiya

2015

MATEC Web of Conferences

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Abstract. The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance characteristics. Growing demand for less weight, high accuracy, high precision, meagre lead time, reduced batch size, less human interference are the key drivers for the micromachining than the conventional machining process.

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“…The standard cleanroom based fabrication methods are very precise but they are also costly and require significant infrastructure and expertise. In addition to lithography and etching, silicon can be patterned by laser ablation [ 1 , 2 ], ion beam milling [ 3 ] and traditional micromachining, such as electro-discharge machining, micro-dicing and cutting [ 4 ]. These techniques are limited either by expensive instruments and small writable areas, or by poor resolution and limited shape freedom, which limit their usability.…”

Section: Introductionmentioning

confidence: 99%

Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

et al. 2016

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We introduce a non-lithographical and vacuum-free method to pattern silicon. The method combines inkjet printing and metal assisted chemical etching (MaCE); we call this method “INKMAC”. A commercial silver ink is printed on top of a silicon surface to create the catalytic patterns for MaCE. The MaCE process leaves behind a set of silicon nanowires in the shape of the inkjet printed micrometer scale pattern. We further show how a potassium hydroxide (KOH) wet etching process can be used to rapidly etch away the nanowires, producing fully opened cavities and channels in the shape of the original printed pattern. We show how the printed lines (width 50–100 µm) can be etched into functional silicon microfluidic channels with different depths (10–40 µm) with aspect ratios close to one. We also used individual droplets (minimum diameter 30 µm) to produce cavities with a depth of 60 µm and an aspect ratio of two. Further, we discuss using the structured silicon substrate as a template for polymer replication to produce superhydrophobic surfaces.

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Laser Micromachining

Cited by 17 publications

References 4 publications

Lasers Based Manufacturing

Lasers Based Manufacturing

Micromachining process – current situation and challenges

Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

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