2014
DOI: 10.31399/asm.cp.istfa2014p0065
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Laser Logic State Imaging (LLSI)

Abstract: Logic State Imaging (LSI) using Infra-Red Emission Microscopy (IREM) [1-4] has been an indispensable technology for silicon CMOS process development and product debug applications. Its main limitations are relatively poor spatial resolution due to the broadband near-infrared photons emitted, and poor Signal to Noise Ratio (SNR) with low voltage and low leakage processes and products. Continuous-Wave Laser Scanning Microscope (CW-LSM) based Signal Imaging and Probing (CW-SIP) [5-9] technology is also widely use… Show more

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Cited by 17 publications
(7 citation statements)
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“…Detecting capacitor-based Trojans Results from [24] indicate that decoupling capacitors can be imaged using LLSI, see Fig. 14a.…”
Section: Discussionmentioning
confidence: 99%
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“…Detecting capacitor-based Trojans Results from [24] indicate that decoupling capacitors can be imaged using LLSI, see Fig. 14a.…”
Section: Discussionmentioning
confidence: 99%
“…Using classical EOFM, only periodically switching elements on the chip can be detected. The static logic state of circuits, however, can be captured using laser logic state imaging (LLSI), which was introduced as an extension to EOFM [24]. The main idea behind LLSI is to stop the clock and induce a periodic frequency into the entire logic by modulating the power supply, see Fig.…”
Section: Modulated Lightmentioning
confidence: 99%
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“…2) LLSI: Laser Logic State Imaging (LLSI) makes the readout of static signals possible. The technique was introduced as an extension to EOFM to the failure analysis community [50]. For LLSI the supply voltage is modulated with a known frequency.…”
Section: B Optical Backside Failure Analysis Techniquesmentioning
confidence: 99%