Laser Lift‐Off Technologies for Ultra‐Thin Emerging Electronics: Mechanisms, Applications, and Progress

Wang, Fangcheng; Liu, Qiang; Jian-wen, Xia; Huang, Ming-Qiu; Wang, Xuefan; Dai, Wenxue; Zhang, Guoping; Yu, Daquan; Li, Jinhui; Sun, Rong

doi:10.1002/admt.202201186

Cited by 12 publications

(7 citation statements)

References 112 publications

(212 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A directional light source, such as a laser, can be utilized in μ-ILED transfer technique, by inducing localized heating, material decomposition, and delamination with its highly concentrated energy. As such, laser lift-off (LLO) technology is a well-established technique to release the μ-ILEDs from the original substrate with high transfer speed and yield. − As an example, blue μ-ILEDs composed of epitaxially grown GaN, current-spreading layers, metal pads, and a passivation layer were fabricated on a sapphire substrate . The schematic illustration of the LLO transfer steps is described in Figure D.…”

Section: Materials For Flexible and Stretchable Ledsmentioning

confidence: 99%

Flexible and Stretchable Light-Emitting Diodes and Photodetectors for Human-Centric Optoelectronics

Chang,

Koo,

Yoo

et al. 2024

Chem. Rev.

View full text Add to dashboard Cite

Optoelectronic devices with unconventional form factors, such as flexible and stretchable light-emitting or photoresponsive devices, are core elements for the nextgeneration human-centric optoelectronics. For instance, these deformable devices can be utilized as closely fitted wearable sensors to acquire precise biosignals that are subsequently uploaded to the cloud for immediate examination and diagnosis, and also can be used for vision systems for human-interactive robotics. Their inception was propelled by breakthroughs in novel optoelectronic material technologies and device blueprinting methodologies, endowing flexibility and mechanical resilience to conventional rigid optoelectronic devices. This paper reviews the advancements in such soft optoelectronic device technologies, honing in on various materials, manufacturing techniques, and device design strategies. We will first highlight the general approaches for flexible and stretchable device fabrication, including the appropriate material selection for the substrate, electrodes, and insulation layers. We will then focus on the materials for flexible and stretchable lightemitting diodes, their device integration strategies, and representative application examples. Next, we will move on to the materials for flexible and stretchable photodetectors, highlighting the state-of-the-art materials and device fabrication methods, followed by their representative application examples. At the end, a brief summary will be given, and the potential challenges for further development of functional devices will be discussed as a conclusion.

show abstract

Section: Materials For Flexible and Stretchable Ledsmentioning

confidence: 99%

Flexible and Stretchable Light-Emitting Diodes and Photodetectors for Human-Centric Optoelectronics

Chang,

Koo,

Yoo

et al. 2024

Chem. Rev.

View full text Add to dashboard Cite

show abstract

Section: Manufacturing Technologiesmentioning

confidence: 99%

“…A series of chemical reactions and physical changes are induced at the interface when the responsive material is exposed to laser light through a transparent carrier. [102] Park et al [41] employed inorganic-based LLO method to fabricate PZT based-ultrathin soft sensors. In the process of fabrication, to exfoliate the PZT thin film off the hard substrate, a 308 nm XeCl excimer laser was irradiated to the backside of the sapphire substrate.…”

Section: Lasermentioning

confidence: 99%

Advances in Ultrathin Soft Sensors, Integrated Materials, and Manufacturing Technologies for Enhanced Monitoring of Human Physiological Signals

Kim

Lee

Byun

et al. 2023

Adv Elect Materials

View full text Add to dashboard Cite

Recent advances in soft sensors and flexible electronics offer various applications in detecting physical, electrical, and chemical signals. However, there are still technical barriers in current mechanical, electrical, and material properties for enhanced signal sensing. When measuring signals from the human skin, minimizing the skin‐sensor contact impedance is still challenging while maximizing sensitivity through optimized materials and soft electronics. Here, this review summarizes recent advances in materials, manufacturing, and integration technologies to develop ultrathin soft sensors for monitoring various human physiological signals. The enhancements in soft and compliant structures and mechanical properties are critical to making reliable wearable electronic systems. This article shares the details of soft sensors, integration processes, manufacturing methods, and their applications to target physical, electrical, and chemical signals. In addition, the limitations and current trends in developing multifunctional sensors, self‐powered devices, and integration with external stimuli systems are discussed.

show abstract

“…[11][12][13][14] Therefore, highefficiency micro LED display technology has made it possible to create micro-LED televisions or augmented reality (AR) displays through the assembly of micro-LED modules or the mass transfer of individual micro-LEDs. [15][16][17][18][19] However, despite the advantages that micro-LED display technology offers over TFT-LCD and AM-OLED displays, its high production costs and material expenses remain obstacles to its widespread application, particularly for home-use televisions and smart glasses. To make micro-LED displays more accessible, the cost of producing high-resolution displays should be significantly reduced, and individual micro-LED chips should become more affordable.…”

Section: Doi: 101002/adfm202303727mentioning

confidence: 99%

Development and Isolation of Dot LEDs for Display Applications through Electrochemical Etching and Sonochemical Separation

Ko,

Hong,

et al. 2023

Adv Funct Materials

View full text Add to dashboard Cite

This paper presents a top‐down fabrication and an isolation process for producing billions of multifunctional dot light‐emitting diodes (LEDs) without a sacrificial layer. The process involves a combination of electrochemical etching (ECE) of an n‐GaN layer and sonochemical separation of an etched porous layer to isolate the dot LEDs. The structure of the developed dot LEDs can be expressed as Au/indium tin oxide (ITO)/p‐GaN/multiple quantum well (MQW)‐InGaN/n‐GaN@SiO2. The nanopore size, separation ratio, and emission characteristics of dot LEDs produced by ECE are investigated, as well as the solvent type on ultrasonic separation in the sonochemical process. Blue electroluminance devices fabricated in a vertical structure using dot LEDs exhibit a peak external quantum efficiency (EQE) of 6.21% at an applied voltage of 4.0 V, and a luminous efficacy of 1070 cd m−2, at an applied voltage of 10.0 V. Although the current technology for blue dot LEDs may not produce a higher EQE than the existing display technologies, it is essential to consider that the development of dot LED displays is still in its early stages. Furthermore, the findings show that the dot LEDs have the potential to significantly reduce material costs and provide new opportunities for nanoscale GaN‐based LED displays.

show abstract

Laser Lift‐Off Technologies for Ultra‐Thin Emerging Electronics: Mechanisms, Applications, and Progress

Abstract: PbZr 0.52 Ti 0.48 O 3 UV laser 308 500 30 ns, 620 × 620 µm 2 Memories [32]

Cited by 12 publications

References 112 publications

Flexible and Stretchable Light-Emitting Diodes and Photodetectors for Human-Centric Optoelectronics

Flexible and Stretchable Light-Emitting Diodes and Photodetectors for Human-Centric Optoelectronics

Advances in Ultrathin Soft Sensors, Integrated Materials, and Manufacturing Technologies for Enhanced Monitoring of Human Physiological Signals

Development and Isolation of Dot LEDs for Display Applications through Electrochemical Etching and Sonochemical Separation

Contact Info

Product

Resources

About