2005
DOI: 10.1016/j.apsusc.2005.01.164
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Laser interaction in sol–gel based materials—3-D lithography for photonic applications

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Cited by 60 publications
(41 citation statements)
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“…Photocurable materials have attracted great interest over the past decade for micro/nanofabrication processes of two-and three-dimensional (3D) microstructures employing techniques such as UV-lithography [1][2][3] and twophoton polymerization (2PP) [4,5]. The applications of such microstructures are constantly expanding and to date they have found use in fields as diverse as biotechnology [6], nanomedicine [7], information technology (e.g.…”
Section: Introductionmentioning
confidence: 99%
“…Photocurable materials have attracted great interest over the past decade for micro/nanofabrication processes of two-and three-dimensional (3D) microstructures employing techniques such as UV-lithography [1][2][3] and twophoton polymerization (2PP) [4,5]. The applications of such microstructures are constantly expanding and to date they have found use in fields as diverse as biotechnology [6], nanomedicine [7], information technology (e.g.…”
Section: Introductionmentioning
confidence: 99%
“…[4][5][6] In addition, when femtosecond laser beams are tightly focused, multiphoton absorption (MPA) is induced in a region of volume around l 3 or even below the diffraction limit. [7][8][9] Given that DLW methods are sequential, long processing times are necessary to fabricate high density patterns on large areas (up to several hours). [10] This disadvantage can be overcome by using MLI patterning.…”
mentioning
confidence: 99%
“…[1][2][3] The interaction volumetric pixel ͑voxel͒ is much smaller than any produced by single-photon absorption due to the dependence of the photoinitiator absorption on the square of the laser beam intensity. In addition, there is a threshold for the polymerization process and this can be utilized in order to reduce the effective diameter of the Gaussian focal spot by ensuring that the low intensity wings of the laser intensity distribution are below this threshold.…”
mentioning
confidence: 99%
“…In addition, there is a threshold for the polymerization process and this can be utilized in order to reduce the effective diameter of the Gaussian focal spot by ensuring that the low intensity wings of the laser intensity distribution are below this threshold. 3 Using this technique, complex shapes such as micromodels, woodpile photonic structures and spiral structures, have been realized in several material systems: sol gels, organically modified ceramics, and resins. 1,[3][4][5] Traditionally the fabrication process is a serial writing technique where the voxel is scanned through the volume of the material as a series of curved or straight lines.…”
mentioning
confidence: 99%
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