The
bottom-up approach to directly synthesizing low-dimensional
materials with outstanding performance has extended the material basis
for the next generation integrated circuit industry. All the low-dimensional
semiconductors, metals, dielectrics, and their heterojunctions are
very promising bricks to build faster and more efficient chips because
of their atomically smooth surface and interfaces. The greatest challenge
in the synthesis of nanomaterials is how to precisely control the
structure, crystalline orientation, defects, dimensions, etc. In past
decades, both the methodology and the mechanism of synthesis have
been systematically investigated to improve the controllability. However,
few studies focused on sensing the synthesis processes in situ and
responding to the synthesis immediately. Here, we propose the concept
of intelligent synthesis in which the final product can be automatically
fine-controlled by a closed loop including in situ monitoring and
real-time interventions. As a model system, a high-temperature-tolerant
circuit is fabricated on the single-walled carbon nanotube (SWCNT)
growth substrate for sensing and responding to the synthesis processes.
As a result, either highly pure semiconducting (s-) SWCNT arrays or
metallic-semiconducting (m-s) junction arrays with different junction
positions is simply synthesized by programming the responding signal.
The intelligent synthesis shows much higher efficiency and controllability
compared to conventional methods and will lead to the next leap in
nanotechnology.