Currently, there is an increased interest among scientists in laser-induced methods (LIPAA, LIBDE, LIMP) for optical materials processing. The plume is formed due to the interaction of laser radiation transmitted through the glass sample with an absorbing target. In particular, laserinduced microplasma (LIMP) glass processing method development is realized by a plasma plume action arising at the interface of a carbon-based target and an optically transparent sample. Basically, the plasma plume can be considered as a spot tool that forms micro and nano-dimensional relief on the sample surface. This tool is needed to be investigated in the following way: geometry, divergence, and temperature. Detailed knowledge of these characteristics will improve the processing results. Here, we report on a detailed experimental study of glass processing by LIMP.