2017
DOI: 10.1070/qel16377
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Laser-induced microplasma as a tool for microstructuring transparent media

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Cited by 26 publications
(8 citation statements)
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“…As a result of laser plasma generation, a plasma plume is formed at the glass-target interface, (Figure 1a). Plasma plume consists of partially ionized carbon and oxygen atoms with a thermodynamic temperature ~10,000 K [4]. In the absence of free space for expansion, the plasma begins to thermally act on the glass surface initiating the etching process in the affected area.…”
Section: Resultsmentioning
confidence: 99%
“…As a result of laser plasma generation, a plasma plume is formed at the glass-target interface, (Figure 1a). Plasma plume consists of partially ionized carbon and oxygen atoms with a thermodynamic temperature ~10,000 K [4]. In the absence of free space for expansion, the plasma begins to thermally act on the glass surface initiating the etching process in the affected area.…”
Section: Resultsmentioning
confidence: 99%
“…Recently, we have proposed a technology for fabrication OEs for various purposes on optical amorphous materials by the laser-induced microplasma (LIMP) etching [35], [36]. The essence of this technology can be summarized as follows.…”
Section: Choice Of Svr Fabrication Technologymentioning
confidence: 99%
“…The LIMP etching has your disadvantages and bottlenecks as all techniques of laser-induced plasma-assisted processing of transparent materials (for example, LIPAA [37], LIBWE [38], LIBDE [39] and etc). Several of ones are the use of laser beam absorber for initiation of plasma, the high influence of plasma parameters on the quality of surface processing [36], the low resolution in the plane of etching at the compared of photolithography, the additional removal of carbon-like products on the next step after laser writing of OEs [40]. However, such technology of fast fabrication of different OEs is very effective for scientific laboratories and small fabrications.…”
Section: Choice Of Svr Fabrication Technologymentioning
confidence: 99%
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“…Laser ablation in liquid (LAL) is important for many technological applications listed in the recent reviews [1,2] and papers [3,4,5,6,7,8]. Another important direction of industrial applications is connected with laser shock peening (LSP) [9,10,11,12,13]. Theoretical analysis of LSP is related to the analysis of laser initiated shock waves.…”
Section: Introductionmentioning
confidence: 99%