1991
DOI: 10.1016/0169-4332(91)90072-r
|View full text |Cite
|
Sign up to set email alerts
|

Laser-induced forward transfer of aluminium

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

0
16
0
1

Year Published

2011
2011
2019
2019

Publication Types

Select...
6
2
1

Relationship

0
9

Authors

Journals

citations
Cited by 62 publications
(17 citation statements)
references
References 8 publications
0
16
0
1
Order By: Relevance
“…The laser induced forward transfer (LIFT) process was developed by Bohandy 1 in 1986 with a strong phase of research during the 1990s. [2][3][4] The LIFT process transfers, e.g., thin metal layers from a glass support onto a substrate. A pulsed laser beam heats and melts the metal through the glass support.…”
mentioning
confidence: 99%
“…The laser induced forward transfer (LIFT) process was developed by Bohandy 1 in 1986 with a strong phase of research during the 1990s. [2][3][4] The LIFT process transfers, e.g., thin metal layers from a glass support onto a substrate. A pulsed laser beam heats and melts the metal through the glass support.…”
mentioning
confidence: 99%
“…At this step, the process is accompanied by the loss of Al and the contact resistance of the local contact holes is high because of the incomplete alloying of Si and Al. At the next step, we transfer Al to the local contact holes using the laser‐induced forward transfer (LIFT) method to compensate the Al loss induced by the subthreshold LFC step . Lastly, we performed laser firing of transferred Al to enhance local BSF formation.…”
Section: Introductionmentioning
confidence: 99%
“…At the next step, we transfer Al to the local contact holes using the laser-induced forward transfer (LIFT) method to compensate the Al loss induced by the subthreshold LFC step. 18,22,23 Lastly, we performed laser firing of transferred Al to enhance local BSF formation.…”
mentioning
confidence: 99%
“…under atmospheric conditions, without the need for a vacuum (Bohandy et al, 1988). The LIFT technique gained acceptance in a short time and was used successfully for a wide variety of single element materials, mainly metals such as copper (Bohandy et al, 1988), vanadium (Mogyorósi et al, 1989), gold (Baseman et al, 1990;Bohandy et al, 1988), aluminum (Schultze & Wagner, 1991), tungsten (Kántor et al, 1994;Tóth et al, 1993), chromium (Zergioti et al, 1998a), nickel (Sano et al, 2002) and Ge/Se thin film structures (Tóth & Szörényi, 1991). Reports of LIFT for oxide compounds such as Al 2 O 3 (Greer & Parker, 1988), In 2 O 3 (Zergioti et al, 1998b), V 2 O 5 (Chakraborty et al, 2007) and YBa 2 Cu 3 O 7 high temperature superconductors (Fogarassy et al, 1989) are worth mentioning, although the quality of the transferred ceramics was not as good as those deposited by traditional film growth techniques.…”
Section: Understanding the Laser Transfer Processmentioning
confidence: 99%