Laser induced fluorescence spectroscopy of WF6/M (M=H2, Ar) gas mixtures during LCVD of W at a high laser energy density

The luminescence that is observed under gas phase photolytic deposition conditions is studied for Cr(hfac)3, Ni(hfac)2, and Pt(hfac)2. This luminescence is analyzed under a variety of conditions, including the relatively high pressures of an evacuated gas cell and the collision-free conditions of a molecular beam. The effects of inert buffer gas are also studied. Features in these spectra indicate that, in general, multiple photolysis processes occur. Some simple fragments that are produced from these compounds are identified, including bare metal atoms (Ni, Cr), metal monofluorides (NiF, CrF), CH (in the case of Ni(hfac)2), and metal carbide from Pt(hfac)2. It is postulated that the difference in the observed photofragmentation pathway in the case of platinum is due to σ bonding to the β carbon of the hfac moiety as opposed to the bidentate bonding of the other two metals. Possible mechanisms are presented. Detailed analysis of the spectra allows characterization of the internal energy of the platinum carbide photofragment.

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Phosphorescence from tungsten clusters during laser-assisted chemical-vapor deposition of tungsten

Heszler

Mogyorósi

Carlsson

1995

Journal of Applied Physics

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Phosphorescent light emission was investigated upon irradiation of WF&-12/noble gas (Ar, Kr, Ne, Xe) mixtures by At-F excimer laser. The continuous, broadband phosphorescence emission originates from excited tungsten clusters. The phosphorescence ceased with increased Xe and H, concentrations. Xe inhibits the formation of tungsten clusters and H, quenches the phosphorescence. The H, quenching rate and the unperturbed phosphorescence lifetime were determined to be 2.8X lo4 mbar-t s-' and 23 ,us, respectively. The intensity dependence of phosphorescence on the WF, partial pressure shows a rising part, then a declining part, and finally an increasing part again. It was shown that the declining part can be interpreted by scattering of the emitted phosphorescence. The phosphorescence intensity was dependent on the noble gas/H, concentration ratio. This effect was explained in terms of the thermal conductivity of the WF&-$/noble gas mixture, which influences the lifetime of the activated subfluorides and, thus, the cluster formation and growth rate. The intensity of the laser beam had a nonlinear effect on the phosphorescent light intensity due to the nonlinearly coupled photolytical steps of WF, and of the subfluorides. 0 1995 American Institute of Physics.

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Laser induced fluorescence spectroscopy of WF6/M (M=H2, Ar) gas mixtures during LCVD of W at a high laser energy density

Cited by 3 publications

References 7 publications

Scattered light investigation during LCVD of W from WF6/H2/Ar gas mixture

Scattered light investigation during LCVD of W from WF6/H2/Ar gas mixture

Luminescent Photofragments of (1,1,1,5,5,5-Hexafluoro-2,4-pentanedionato) Metal Complexes in the Gas Phase

Phosphorescence from tungsten clusters during laser-assisted chemical-vapor deposition of tungsten

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