“…Compared with ordinary light source, laser has the advantages of good mono-chromaticity, high brightness and good directivity, and the combination of diffraction grating and laser light source suitable for integration is widely used in many modern optical systems [1,2], such as switches [3][4][5][6], sensors [7][8][9][10], solar cells [11][12][13][14] spectrometer [15,16], polarizer [17,18], laser [19][20][21][22], beam splitter [23], wavelength multiplexers [24], and so on. The surface-relief grating is fabricated by a photolithography process [25].…”