2006
DOI: 10.1002/ppap.200500103
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Laser Heterodyne Measurement of Photothermal Displacement for Material Surface Characterization

Abstract: Summary: Double‐heterodyne photodisplacement technique (PDT), based on the detection of the thermal expansion of a sample under irradiation by laser light has been employed to improve the resolution of photothermal displacement measurements up to orders of sub‐picometers. We have developed an ultra‐sensitive system to measure photothermal displacement of metallic and non‐metallic materials, such as silicon, due to the illumination by an ordinary laser diode. Non‐destructive characteristics of the scheme are we… Show more

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Cited by 2 publications
(1 citation statement)
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“…Among nondestructive methods for investigation, optical methods are distinguished by the property to measure versatile physical parameters with high sensitivity unaffected by excessive electromagnetic fields. Layer thickness, optical indices and thermal properties determining the physical and chemical structures are assessable by the phase-sensitive interferometric methods like ellipsometry and laser heterodyne detection of photothermal displacement [1][2][3] . However, these methods are typically sophisticated and susceptible to random changes of the optical path causing inevitable vibration and depolarization noises.…”
Section: Introductionmentioning
confidence: 99%
“…Among nondestructive methods for investigation, optical methods are distinguished by the property to measure versatile physical parameters with high sensitivity unaffected by excessive electromagnetic fields. Layer thickness, optical indices and thermal properties determining the physical and chemical structures are assessable by the phase-sensitive interferometric methods like ellipsometry and laser heterodyne detection of photothermal displacement [1][2][3] . However, these methods are typically sophisticated and susceptible to random changes of the optical path causing inevitable vibration and depolarization noises.…”
Section: Introductionmentioning
confidence: 99%