Laser formation of nano-Si structures in glasses

Abstract

The irradiation of a BOROFLOAT® 33 glass plate with lithographically-fabricated array of aluminum nanodisks on the surface by a focused low-power 523 nm laser beam resulted in the formation of silicon nanocrystals in the subsurface layer of the glass. The nano-Si was registered with Raman scattering technique. The formation of the nano-Si is local and grown nanocrystals are stable.