Laser-fabrication of length-controlled sub-micrometer periodic structures in the bulk of fused silica

Datta, Srijoyee; Clady, R.; Utéza, O.; Sanner, N.

doi:10.1117/12.2647555

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII 2023

DOI: 10.1117/12.2647555

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Laser-fabrication of length-controlled sub-micrometer periodic structures in the bulk of fused silica

Srijoyee Datta

R. Clady²,

O. Utéza³

et al.

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Laser-fabrication of length-controlled sub-micrometer periodic structures in the bulk of fused silica

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