Laser direct patterning of AgNW/CNT hybrid thin films

Yoon, Ji-Wook; Chang, Won Seok; Cho, Sung Hak

doi:10.1016/j.optlaseng.2015.04.003

Cited by 28 publications

(16 citation statements)

References 15 publications

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“…However, the majority of conventional methods share a common issue that a large amount of AgNWs was wasted for the patterning process. During the photolithography 34 , 35 and laser ablation process 36 , 37 , unused AgNWs were discarded with an etchant or high-energy laser. Dip coating and spray coating 38 – 41 with a stencil mask resulted in the deposition of AgNWs on not only the uncovered substrate but also the stencil mask, which would be removed after the patterning process.…”

Section: Introductionmentioning

confidence: 99%

Highly efficient patterning technique for silver nanowire electrodes by electrospray deposition and its application to self-powered triboelectric tactile sensor

Song

Choi

et al. 2021

Sci Rep

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A patterned transparent electrode is a crucial component of state-of-the-art wearable devices and optoelectronic devices. However, most of the patterning methods using silver nanowires (AgNWs), which is one of the outstanding candidate materials for the transparent electrode, wasted a large amount of unused AgNWs during the patterning process. Here, we report a highly efficient patterning of AgNWs using electrospray deposition with grounded electrolyte solution (EDGE). During electrospray deposition, a patterned electrolyte solution collector attracted AgNWs by strong electrostatic attraction and selectively deposited them only on the patterned collector, minimizing AgNW deposited elsewhere. The enhanced patterning efficiency was verified through a comparison between the EDGE and conventional process by numerical simulation and experimental validation. As a result, despite the same electrospray deposition conditions for both cases except for the existence of the electrolyte solution collector, the coverage ratio of AgNWs fabricated by the EDGE process was at least six times higher than that of AgNWs produced by the conventional process. Furthermore, the EDGE process provided high design flexibility in terms of not only the material of the substrate, including a polymer and a ceramic but also the shape of the substrate, including a 2D flat and 3D curved surface. As an application of the EDGE process, a self-powered touch sensor exploiting the triboelectric effect was demonstrated. Thus, the EDGE process would be utilized in further application in wearable or implantable devices in the field of biomedicine, intelligent robots, and human–machine interface.

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Section: Introductionmentioning

confidence: 99%

Highly efficient patterning technique for silver nanowire electrodes by electrospray deposition and its application to self-powered triboelectric tactile sensor

Song

Choi

et al. 2021

Sci Rep

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“…Yoon, J.W. et al [18] used a femtosecond laser to process a thin film of silver nanowires and CNTs. The edge of the cutting position is not uniform due to the different thresholds of Ag and CNTs, but it can be reduced by laser beam shaping in the edge deformation zone of the composite film.…”

Section: Introductionmentioning

confidence: 99%

Ablation and Patterning of Carbon Nanotube Film by Femtosecond Laser Irradiation

Yin

2019

Applied Sciences

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Carbon nanotube (CNT) film can be used as thin film electrodes and wearable electronic devices due to their excellent mechanical and electrical properties. The femtosecond laser has the characteristics of an ultra-short pulse duration and an ultra-high peak power, and it is one of the most suitable methods for film material processing. The ablation and patterning of CNT film are performed by a femtosecond laser with different parameters. An ablation threshold of 25 mJ/cm2 was obtained by investigating the effects of laser pulse energy and pulse number on ablation holes. Raman spectroscopy and scanning electron microscope (SEM) were used to characterize the performance of the pattern groove. The results show that the oligomer in the CNT film was removed by the laser ablation, resulting in an increase in Raman G band intensity. As the laser increased, the ablation of the CNTs was caused by the energy of photons interacting with laser-induced thermal elasticity when the pulse energy was increased enough to destroy the carbon–carbon bonds between different carbon atoms. Impurities and amorphous carbon were found at and near the cut edge while laser cutting at high energy, and considerable distortion and tensile was produced on the edge of the CNTs’ groove. Furthermore, appropriate cutting parameters were obtained without introducing defects and damage to the substrate, which provides a practical method applied to large-area patterning machining of CNT film.

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“…Alternatively, fabrication techniques of AgNW patterns directly on the target substrate have also been developed using microfluidic processing technique, microchannel wetting, and laser direct patterning . The microfluidic processing technique using microfluidic channels and thermal annealing gradients is rapid and economical way to fabricate AgNW patterns, which is however hard to fabricate AgNW patterns in tens of micrometers.…”

Section: Introductionmentioning

confidence: 99%

“…24−26 For transfer printing of AgNWs, the patterned PDMS stamp, 24 and patterned/aligned AgNW sheet on the PDMS stamp with meniscus-dragging deposition 25 and reconfigurable topographic substrates 26 Alternatively, fabrication techniques of AgNW patterns directly on the target substrate have also been developed using microfluidic processing technique, 27 microchannel wetting, 28 and laser direct patterning. 29 The microfluidic processing technique using microfluidic channels and thermal annealing gradients is rapid and economical way to fabricate AgNW patterns, which is however hard to fabricate AgNW patterns in tens of micrometers. On the other hand, the microchannel wetting and laser direct patterning methods can achieve micrometer-sized AgNW patterns but are hardly applicable for wafer-scale fabrication due to the cost, time, and yield.…”

Section: ■ Introductionmentioning

confidence: 99%

A Method to Pattern Silver Nanowires Directly on Wafer-Scale PDMS Substrate and Its Applications

Chou

Kim

2016

ACS Appl. Mater. Interfaces

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This study describes a fabrication method of microsized AgNW patterns based on poly dimethylsiloxane (PDMS) substrate using a poly(p-xylylene) (parylene) stencil technique. Various patterns of AgNW conductive sheets were created on the wafer scale area in the forms of straight and serpentine lines, texts, and symbols, which dimensions ranged from a few tens of micrometers to hundreds of micrometers. We demonstrated the electrical performance of straight line and serpentine line patterned AgNW electrodes when subjected to mechanical strains. The gauge factor and stretchability ranged from 0.5 to 55.2 at 2% uniaxial strain and from 4.7 to 55.7%, respectively, depending on the shapes and structures of the AgNW electrodes. Using the developed AgNW patterning technique, we fabricated strain sensors to detect small body signals epidermally such as hand motion, eye blink and heart rate. Also, tactile sensors were fabricated and exhibited the sensitivity of 3.91 MPa(-1) in the pressure range lower than 50 kPa, and 0.28 MPa(-1) in the pressure range greater than 50 kPa up to 1.3 MPa. From these results, we concluded that the proposed technique enables the fabrication of reliable AgNW patterns on wafer-scale PDMS substrate and the potential applications for various flexible electronic devices.

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Laser direct patterning of AgNW/CNT hybrid thin films

Cited by 28 publications

References 15 publications

Highly efficient patterning technique for silver nanowire electrodes by electrospray deposition and its application to self-powered triboelectric tactile sensor

Highly efficient patterning technique for silver nanowire electrodes by electrospray deposition and its application to self-powered triboelectric tactile sensor

Ablation and Patterning of Carbon Nanotube Film by Femtosecond Laser Irradiation

A Method to Pattern Silver Nanowires Directly on Wafer-Scale PDMS Substrate and Its Applications

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