Laser diode interferometer used for measuring displacements in large range with a nanometer accuracy

Wang, Xuefeng; Wang, Xiangzhao; Lu, Hongbin; Qian, Feng; Yang, Bojun

doi:10.1016/s0030-3992(01)00027-5

Cited by 16 publications

(10 citation statements)

References 9 publications

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“…Consequently, velocity of measurement is significantly slower than the optical processing. The demand for laser with a fast modulation capability can be fulfilled, to a certain extent, by cost-effective semiconductor lasers [20,21]. …”

Section: Resultsmentioning

confidence: 99%

Detection of Interference Phase by Digital Computation of Quadrature Signals in Homodyne Laser Interferometry

Řeřucha

Buchta

Šarbort

et al. 2012

Sensors

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Abstract:We have proposed an approach to the interference phase extraction in the homodyne laser interferometry. The method employs a series of computational steps to reconstruct the signals for quadrature detection from an interference signal from a non-polarising interferometer sampled by a simple photodetector. The complexity trade-off is the use of laser beam with frequency modulation capability. It is analytically derived and its validity and performance is experimentally verified. The method has proven to be a feasible alternative for the traditional homodyne detection since it performs with comparable accuracy, especially where the optical setup complexity is principal issue and the modulation of laser beam is not a heavy burden (e.g., in multi-axis sensor or laser diode based systems).

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Section: Resultsmentioning

confidence: 99%

Detection of Interference Phase by Digital Computation of Quadrature Signals in Homodyne Laser Interferometry

Řeřucha

Buchta

Šarbort

et al. 2012

Sensors

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“…The ratio m b was calculated from the value of a by Eq. (12). Fourier transform of St was calculated to get P 1 t and P 2 twhich were used for determination of z with Eq.…”

Section: Methodsmentioning

confidence: 99%

“…During the displacement measurements, the parameter m b is determined from the value of a with Eq. (12). After the determination of m b , the values of z and m b SS 0 are required to calculate the phase αt with Eq.…”

Section: Principlementioning

confidence: 99%

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Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement

Wang

Sasaki

et al. 2012

Appl. Opt.

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In sinusoidal phase-modulating laser diode interferometers, an injection current of a laser diode is sinusoidally modulated to scan the laser wavelength. However, the modulation of the injection current also involves an intensity modulation of the light, which increases the measurement error if a conventional signal processing is used. A novel signal processing for displacement measurement is proposed to eliminate the influence of the intensity modulation. Numerical simulation results and experimental results make it clear that an optimal depth of the sinusoidal phase modulation exists that can reduce the measurement error to a few nanometers.

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“…The difference in distances d1 and d2 emulates the difference in wavelengths from the two-wavelength heterodyne principle. The effective wavelength of the spatial heterodyne system can be shown to be given by: Aeff di_d2IA (2) where A is the operation wavelength.…”

Section: Spatial Heterodyne Principlementioning

confidence: 99%

<title>Holographic common-path interferometer for measuring tilt or vibrations utilizing a spatial heterodyne principle</title>

Kitchen¹,

Dam-Hansen²

2002

SPIE Proceedings

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A novel technique for extending the unambiguous range for differential measurements of linear surface deflections is presented. The principle utilises a new type of spatial heterodyne system, where a common-path interferometer probes the axial displacement of three points on the object surface simultaneously. The system is based on a single laser diode with all the optical functions of the system implemented in a single holographic optical element (HOE). The common-path scheme combined with the HOE provides a system that is inherently stable, since the HOE operates both as transmitter and receiver in the system. The HOE at the same time provides a simple and all passive quadrature phase measurement without the need for any active elements or polarising optics. The system is compact, robust, and has the potential for being mass-produced at a low cost and is thus well suited for industrial use. The demonstrated system can measure vibrations or tilt with an unambiguous dynamic range of approximately 1:14,000. Furthermore, the system can easily be reconfigured for a desired sensitivity and dynamic range.

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Laser diode interferometer used for measuring displacements in large range with a nanometer accuracy

Cited by 16 publications

References 9 publications

Detection of Interference Phase by Digital Computation of Quadrature Signals in Homodyne Laser Interferometry

Detection of Interference Phase by Digital Computation of Quadrature Signals in Homodyne Laser Interferometry

Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement

<title>Holographic common-path interferometer for measuring tilt or vibrations utilizing a spatial heterodyne principle</title>

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