Laser decal transfer of freestanding microcantilevers and microbridges

Auyeung, R. C. Y.; Kim, Heung Soo; Birnbaum, Andrew J.; Zalalutdinov, Maxim; Mathews, Scott A.; Piqué, Alberto

doi:10.1007/s00339-009-5433-6

Cited by 52 publications

(21 citation statements)

References 13 publications

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“…Moon et al investigated the thermal behavior of silver nanoparticles (size: <20 nm), and revealed that shrinkage of the silver nanoparticles occurred over the temperature range of 150-250 °C [120]. On the other hand, Auyeung et al investigated the effect of laser decal transfer to micro cantilevers, and they found that mass deduction of micro cantilevers occurs after curing at 200-400 °C [121].…”

Section: Insulating Blockmentioning

confidence: 99%

Hybrid 3D printing by bridging micro/nano processes

Yoon

Jang

Kim

et al. 2017

J. Micromech. Microeng.

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The aim of this work was to develop a novel hybrid manufacturing method for nanoscale three-dimensional (3D) printing with multi-material capabilities. 3D structuring methods at the micro/nanoscale are major goals of various engineering fields, and much work has been carried out to improve the minimum feature size, geometrical complexity, and material selection. With the aim of nanoscale multimaterial printing, a hybrid process was reported with an integrated nanoparticle deposition system (NPDS) and focused ion beam (FIB) system; however this process has limitations in terms of surface roughness and control over the layer thickness, as well as with the process scale, and furthermore, lack of sacrificial layers.In this dissertation, a novel hybrid process is described, which combines aerodynamically focused nanoparticle (AFN) printing, micro-machining and focused ion beam (FIB) milling. AFN printing is based on NPDS, and micromachining was used for local planarization. In addition to these processes, spincoating was used to fabricate sacrificial layers. By bridging these different II micro/nanoscale processes, the resulting hybrid process can address the limitations of the individual processes.To create the hybrid process, each process was investigated to enable compatibility. With the AFN printing system, the surface morphology of a detached substrate was observed, and the bonding mechanism between the substrate and nanoparticles was investigated. A novel printing strategy was identified to reduce the scale of the process. With the micro-machining system, different tool geometries were investigated. Complex geometries inspired by conventional-scale tools were implemented on the micro-scale, and their effects were investigated. With the FIB system, material re-deposition phenomena were investigated to reduce defects that occur during ion sputtering. A novel path-generation strategy was identified and investigated for different scanning paths.Process capability is discussed using fabrication examples and functional applications. The novel hybrid process represents a significant advance in the state of the art, and enables far improved process scales or dimensional degree of freedom, without losing the advantages of broad choice of materials.3D-pinted micro bi-material cantilevers were fabricated as a thermal actuator.The mechanical and thermal properties of the structure were investigated using an in-situ measurement system, and irregular thermal phenomena were analyzed. It is expected that these in-situ measurements of the 3D printed microstructure will contribute to materials research.Various 3D structures can be fabricated using the process described here from a range of metal/ceramic inorganic materials, including polymers. In particular, it is expected that the process will contribute to the area of customized nanoscale structuring, with potential applications in medical treatments. It is also expected that this work will contribute to further improvements in manufacturing technology by combining different m...

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Section: Insulating Blockmentioning

confidence: 99%

Hybrid 3D printing by bridging micro/nano processes

Yoon

Jang

Kim

et al. 2017

J. Micromech. Microeng.

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“…While most direct-write processes are confined to two-dimensional structures and cannot handle materials with high viscosity (particularly inkjet), judicious implementation of LIFT can transcend both constraints. Congruent transfer of three dimensional pixels (called voxels), also referred to as laser decal transfer (LDT) [5][6][7][8][9], has recently been demonstrated with the LIFT technique using highly viscous Ag nanopastes to fabricate freestanding interconnects, complex voxel shapes, and high-aspect-ratio structures. At the same time, pursuit of additive manufacturing techniques for microwave applications such as waveguides and radio-frequency identification has encountered some difficulty in reliably obtaining low losses and fabricating fine features in printed metallic transmission lines, with line widths generally on the order of 0.5 mm or greater [10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Laser-induced forward transfer of silver nanopaste for microwave interconnects

Breckenfeld

Kim

Auyeung

et al. 2015

Applied Surface Science

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“…While most direct-write processes are confined to two-dimensional structures and cannot handle materials with high viscosity (particularly inkjet), LIFT can transcend both constraints if performed properly. Congruent transfer of three dimensional pixels (called voxels), also referred to as laser decal transfer (LDT) [5][6][7][8][9] , has recently been demonstrated with the LIFT technique using highly viscous Ag nanopastes to fabricate freestanding interconnects, complex voxel shapes, and high-aspect-ratio structures. In this paper, we demonstrate a simple yet versatile process for fabricating a variety of micro-and macroscale Ag structures.…”

Section: Introductionmentioning

confidence: 99%

“…When using high viscosity paste, it is possible for the printed voxel to match the size and shape of the incident laser pulse cross section 5 . This process has been referred to as laser decal transfer (LDT), and offers a unique approach to direct-writing in which voxel shape and size are readily controllable parameters, allowing the non-lithographic generation of structures for a wide range of applications such as circuit repair 14 , metamaterials 7 , interconnects 8 , and free-standing structures 15 . The ability to deposit complex shapes in one transfer step greatly reduces the processing time and avoids problems related to the merging of multiple voxels, a common problem in most digital printing techniques.…”

Section: Introductionmentioning

confidence: 99%

Laser-induced Forward Transfer of Ag Nanopaste

Breckenfeld

Kim

Auyeung

et al. 2016

JoVE

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Over the past decade, there has been much development of non-lithographic methods 1-3 for printing metallic inks or other functional materials.Many of these processes such as inkjet 3 and laser-induced forward transfer (LIFT) 4 have become increasingly popular as interest in printable electronics and maskless patterning has grown. These additive manufacturing processes are inexpensive, environmentally friendly, and well suited for rapid prototyping, when compared to more traditional semiconductor processing techniques. While most direct-write processes are confined to two-dimensional structures and cannot handle materials with high viscosity (particularly inkjet), LIFT can transcend both constraints if performed properly. Congruent transfer of three dimensional pixels (called voxels), also referred to as laser decal transfer (LDT) [5][6][7][8][9] , has recently been demonstrated with the LIFT technique using highly viscous Ag nanopastes to fabricate freestanding interconnects, complex voxel shapes, and high-aspect-ratio structures. In this paper, we demonstrate a simple yet versatile process for fabricating a variety of micro-and macroscale Ag structures. Structures include simple shapes for patterning electrical contacts, bridging and cantilever structures, high-aspect-ratio structures, and single-shot, large area transfers using a commercial digital micromirror device (DMD) chip.

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Laser decal transfer of freestanding microcantilevers and microbridges

Cited by 52 publications

References 13 publications

Hybrid 3D printing by bridging micro/nano processes

Hybrid 3D printing by bridging micro/nano processes

Laser-induced forward transfer of silver nanopaste for microwave interconnects

Laser-induced Forward Transfer of Ag Nanopaste

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