Laser Controlled Surface Acoustic Waves

Lomonosov, Alexey M.; Mayer, Andreas; Hess, Peter

doi:10.1016/b978-012445760-7/50009-5

Cited by 10 publications

(5 citation statements)

References 107 publications

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“…Table III indicates a range of values for polycrystalline bulk Nb obtained from the literature. 6 The second and third columns contain values for M Nb measured on the same Nb film sample with surface acoustic wave spectroscopy 4,13 ͑SAWS͒ and instrumented indentation testing. 3 The values indicated are the average of multiple measurements on the same sample.…”

Section: B Finite Element Methodsmentioning

confidence: 99%

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Atomic force acoustic microscopy methods to determine thin-film elastic properties

Hurley

Shen

Jennett

et al. 2003

Journal of Applied Physics

168

140

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We discuss atomic force acoustic microscopy ͑AFAM͒ methods to determine quantitative values for the elastic properties of thin films. The AFAM approach measures the frequencies of an AFM cantilever's first two flexural resonances while in contact with a material. The indentation modulus M of an unknown or test material can be obtained by comparing the resonant spectrum of the test material to that of a reference material. We examined a niobium film (dϭ280Ϯ30 nm) with AFAM using two separate reference materials and two different cantilever geometries. Data were analyzed by two methods: an analytical model based on conventional beam dynamics, and a finite element method that accommodated variable cantilever cross section and viscous damping. AFAM values of M varied significantly depending on the specific experimental configuration and analysis technique.By averaging values obtained with both reference materials, very good agreement ͑5-10 % difference͒ with values determined by other methods was achieved. These results provide insight into using AFAM methods to attain reliable, accurate measurements of elastic properties on the nanoscale.

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Section: B Finite Element Methodsmentioning

confidence: 99%

“…We also compare the AFAM results to those obtained by other techniques such as instrumented indentation 3 and surface acoustic waves. 4 In this way, we hope to contribute to the current understanding of quantitative AFAM.…”

Section: Introductionmentioning

confidence: 99%

Atomic force acoustic microscopy methods to determine thin-film elastic properties

Hurley

Shen

Jennett

et al. 2003

Journal of Applied Physics

168

140

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“…Because of the smallness of the acoustoelastic effect, measurement accuracy of Rayleigh-wave velocity is of prime importance to our present study. In this regard, two methods of Rayleigh-wave measurements, namely that which involves scanning acoustic microscopy (SAM) with immersion transducers [4] and that which uses laser ultrasonics [11], merit special attention. Rayleigh-wave velocity measurements of stress using SAM systems are well documented [6,10,22].…”

Section: Experimental Considerationsmentioning

confidence: 99%

Monitoring near-surface depth profile of residual stress in weakly anisotropic media by Rayleigh-wave dispersion

et al. 2018

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Herein we study the inverse problem on inferring depth profile of near-surface residual stress in a weakly anisotropic medium by boundary measurement of Rayleigh-wave dispersion if all other relevant material parameters of the elastic medium are known. Our solution of this inverse problem is based on a recently developed algorithm by which each term of a highfrequency asymptotic formula for dispersion relations can be computed for Rayleigh waves that propagate in various directions along the free surface of a vertically-inhomogeneous, prestressed, and weakly anisotropic half-space. As a prime example of possible applications we focus on a thick-plate sample of AA 7075-T651 aluminum alloy, which has one face treated by low plasticity burnishing (LPB) that induced a depth-dependent prestress at and immediately beneath the treated surface. We model the sample as a prestressed, weakly-textured orthorhombic aggregate of cubic crystallites and assume that by nondestructive and/or destructive measurements we have ascertained everything about the sample, including the LPB-induced prestress, before it is put into service. Under the supposition that the prestress be partially relaxed but other material parameters remain unchanged after the sample undergoes a period of service, we examine the possibility of inferring the depth profile of the partially relaxed stress by boundary measurement of Rayleigh-wave dispersion.

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“…and reduce the choice of methods. Several techniques have been used to generate Rayleigh-type surface waves, including laser-ultrasound [ 7 , 8 , 9 ], wedges [ 10 ], immerged transducers [ 11 ], line-focus acoustic transducers [ 12 ] and interdigital transducers (IDTs) [ 13 , 14 , 15 ]. The latter enable broadband SAW generation on a piezoelectric substrate in an easily controllable manner using a chirped electrode finger configuration [ 16 ].…”

Section: Introductionmentioning

confidence: 99%

Development of a Broadband (100–240 MHz) Surface Acoustic Wave Emitter Devoted to the Non-Destructive Characterization of Sub-Micrometric Thin Films

Duquennoy

Smagin

Kadi

et al. 2022

Sensors

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In the ultrasonic non-destructive evaluation of thin films, it is essential to have ultrasonic transducers that are able to generate surface acoustic waves (SAW) of suitably high frequencies in a wide frequency range of between ten and several hundred megahertz. If the characterization is carried out with the transducer in contact with the sample, it is also necessary that the transducers provide a high level of mechanical displacement (>100 s pm). This level allows the wave to cross the transducer–sample interface and propagate over the distance of a few millimeters on the sample and be properly detected. In this paper, an emitter transducer formed of interdigitated chirp electrodes deposited on 128° Y-cut LiNbO3 is proposed. It is shown that this solution efficiently enables the generation of SAW (displacement level up to 1 nm) in a frequency range of between 100 and 240 MHz. The electrical characterization and a displacement field analysis of SAW by laser Doppler vibrometry are presented. The transducer’s significant unidirectionality is demonstrated. Finally, the characterization of two titanium thin films deposited on silicon is presented as an example. A meaningful SAW velocity dispersion (~10 m/s) is obtained, which allows for the precise estimation (5% of relative error) of the submicrometer thickness of the layers (20 and 50 nm).

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Laser Controlled Surface Acoustic Waves

Cited by 10 publications

References 107 publications

Atomic force acoustic microscopy methods to determine thin-film elastic properties

Atomic force acoustic microscopy methods to determine thin-film elastic properties

Monitoring near-surface depth profile of residual stress in weakly anisotropic media by Rayleigh-wave dispersion

Development of a Broadband (100–240 MHz) Surface Acoustic Wave Emitter Devoted to the Non-Destructive Characterization of Sub-Micrometric Thin Films

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