Laser chemical vapour deposition

Roy, Susmita

doi:10.1007/bf02744550

Cited by 6 publications

(3 citation statements)

References 16 publications

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“…LCVD may be classified in two groups: pyrolytic LCVD taking advantage of heat and thermal effects and photolytic LCVD using light-wavelength effects [106,107]. In case of pyrolytic CVD, the laser beam impinges locally upon the substrate.…”

Section: Laser-induced Chemical Vapor Deposition (Lcvd)mentioning

confidence: 99%

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Deposition Technologies

Gatzen¹,

Saile²,

Leuthold³

2015

Micro and Nano Fabrication

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Deposition of thin-films used in MEMS and NEMS devices rely on a wide variety of technologies. Physical vapor deposition (PVD) uses physical effects like evaporation or ion bombardment to create thin-films on a substrate by forcing source atoms into a gaseous phase. Chemical vapor deposition (CVD) and similar processes create coatings by a chemical reaction of volatile species by using reaction processes defined by chemical reaction equations. While PVD and CVD are dry processes, for depositing conductive thin-films the substrate may be submerged in an electrically conductive liquid (an electrolyte) and subjected to electrochemical or chemical deposition. Spin-coating and spray-coating are two examples of technologies that lend themselves to creating organic films-a technology widely used in depositing photoresists in photolithography. Dip processes like solgel may be used for the creation of oxide coatings.

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Section: Laser-induced Chemical Vapor Deposition (Lcvd)mentioning

confidence: 99%

“…Alternatively, the laser beam may pass above and across the substrate to induce volume reactions. Roy provides a more detailed description of an LCVD system [106]. An application of LCVD is rerouting input and output lines on an integrated circuit (IC) [108].…”

Section: Laser-induced Chemical Vapor Deposition (Lcvd)mentioning

confidence: 99%

Deposition Technologies

Gatzen¹,

Saile²,

Leuthold³

2015

Micro and Nano Fabrication

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show abstract

“…LCVD is an attractive process for material growth developed almost 30 years ago [14]. It can be broadly classified into two categories: pyrolytic LCVD (heatthermal effect) and photolytic LCVD (light-wavelength effect) [15][16][17][18][19][20][21][22]. In pyrolytic LCVD, a laser beam is used to irradiate the substrate surface locally, creating a hot spot area for the reactant molecules to pyrolyse the chemical reaction.…”

Section: Introduction To Laser Direct Writingmentioning

confidence: 99%

An additive method to fabricate conductive lines and electronic components directly by laser microcladding electronic materials

Zeng

Cai

2009

Proceedings of the Institution of Mechanical Engineers, Part C:

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In this article, a laser direct-write method to fabricate conductive lines and electronic components on insulating boards by using laser microcladding electronic materials is reported. A workstation for implementing this direct-write method was developed, which integrated material deposition (micropen) and laser processing on a single machine. With the computer-aided design/computer-aided manufacturing (CAD/CAM) capability of the workstation, conductive lines, resistors, capacitors, inductors, and thick-film sensors with different patterns were fabricated successfully by this technique in air without mask and with high deposition rates. The minimum widths of the conductive lines and other functional materials were much less than those obtained by the conventional screen printing method. The experimental results demonstrated that passive components and thick-film sensors made by this method have the same properties as those made by conventional thick-film methods, whereas thick films fabricated by this method have much lower widths than those fabricated by the conventional thick-film method. This technique provides a novel method to fabricate the conductive lines and electronic components with high precision and high speed.

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Overview of Coating Deposition Techniques

Mehta

2022

Tribology and Characterization of Surface Coatings

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Laser chemical vapour deposition

Cited by 6 publications

References 16 publications

Deposition Technologies

Deposition Technologies

An additive method to fabricate conductive lines and electronic components directly by laser microcladding electronic materials

Overview of Coating Deposition Techniques

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