1993
DOI: 10.1016/0030-4018(93)90432-5
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Laser beam quality of high pulse repetition frequency excimer lasers

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Cited by 7 publications
(1 citation statement)
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“…Pressure waves are generated in the laser cavity by the subsequent relaxation of the heated gas [15]. So, local depopulation is induced in the discharge centre influencing negatively the laser radiation, because a better optical quality requires an inhomogeneous rate ρ/ρ < 10 −4 (ρ denotes the density of the neutral particles) [16]. In addition, in the case of the excimer mechanisms in repeating regime and in order to maintain the electrical discharge stability, the ratio ρ/ρ < 10 −2 [17].…”
Section: Introductionmentioning
confidence: 99%
“…Pressure waves are generated in the laser cavity by the subsequent relaxation of the heated gas [15]. So, local depopulation is induced in the discharge centre influencing negatively the laser radiation, because a better optical quality requires an inhomogeneous rate ρ/ρ < 10 −4 (ρ denotes the density of the neutral particles) [16]. In addition, in the case of the excimer mechanisms in repeating regime and in order to maintain the electrical discharge stability, the ratio ρ/ρ < 10 −2 [17].…”
Section: Introductionmentioning
confidence: 99%