Laser-based modulation-interference microscopy of optical surfaces

Loparev, A. V.; Romash, E. V.; Zenzinov, A. B.; Ignat’ev, P. S.; Indukaev, K. V.; Osipov, P. A.

doi:10.1364/jot.79.000366

Cited by 3 publications

(4 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The SEM (JSM-IT100 InTouchScop), AFM (Veeco Dimensions 5), WLI (Zygo Newview 5000), and modified MIM-340 were used for experiments [9]. For all measurements same sample and structure were used, scan size for AFM was 20 Â 20 mm, field of view for WLI is 250 Â 250 mm for the 50Â/0.6 lens, field of view for MIM was 20 Â 18 mm for the 50Â/0.8 lens.…”

Section: Discussion Of Resultsmentioning

confidence: 99%

“…The MIM-340 laser interference microscope [9] with modified illuminator scheme was used as experimental setup. Calculation of the object phase shifts is made by modified phase steps method: I 0 ðx; yÞ ¼ Aðx; yÞ þ Bðx; yÞcosðFðx; yÞÞ I 1 ðx; yÞ ¼ Aðx; yÞ þ Bðx; yÞcosðFðx; y þ kdÞÞ I 2 ðx; yÞ ¼ Aðx; yÞ þ Bðx; yÞcosðFðx; y þ 2kdÞÞ I 3 ðx; y; tÞ ¼ Aðx; yÞ þ Bðx; yÞcosðFðx; y þ 3kdðtÞÞÞ…”

Section: Methodsmentioning

confidence: 99%

“…This class brings together methods of white light interferometry [1,2], phase shift interferometry [3][4][5], digital holographic microscopy [6,7], laser interference microscopy [8,9], coherent phase microscopy [10], coherent correlation interferometry [11,12], etc.…”

Section: Introductionmentioning

confidence: 99%

“…It is also discussed new results of a laser interference microscopy methods application for actual problems of optical industry, microelectronics, and biomedical investigations [8,9].…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Nanoscale surface characterization using laser interference microscopy

Ignatyev¹,

Skrynnik²,

Melnik

2017

Mechanics & Industry

View full text Add to dashboard Cite

Abstract. Nanoscale surface characterization is one of the most significant parts of modern materials development and application. The modern microscopes are expensive and complicated tools, and its use for industrial tasks is limited due to laborious sample preparation, measurement procedures, and low operation speed. The laser modulation interference microscopy method (MIM) for real-time quantitative and qualitative analysis of glass, metals, ceramics, and various coatings has a spatial resolution of 0.1 nm for vertical and up to 100 nm for lateral. It is proposed as an alternative to traditional scanning electron microscopy (SEM) and atomic force microscopy (AFM) methods. It is demonstrated that in the cases of roughness metrology for super smooth (Ra >1 nm) surfaces the application of a laser interference microscopy techniques is more optimal than conventional SEM and AFM. The comparison of semiconductor test structure for lateral dimensions measurements obtained with SEM and AFM and white light interferometer also demonstrates the advantages of MIM technique.

show abstract

Section: Discussion Of Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

“…It is also discussed new results of a laser interference microscopy methods application for actual problems of optical industry, microelectronics, and biomedical investigations [8,9].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Nanoscale surface characterization using laser interference microscopy

Ignatyev¹,

Skrynnik²,

Melnik

2017

Mechanics & Industry

View full text Add to dashboard Cite

show abstract

High precision roughness sensor based on annular core optical fiber

Quan

Yuan

2020

Review of Scientific Instruments

View full text Add to dashboard Cite

We present a high precision fiber roughness sensor based on annular core optical fiber (ACF). The ACF has a cone-frustum-shaped tip to enable the annular core to generate a focused ring light. When the incident light passing from the ACF is focused on the rough surface to be measured, the specular light will also be collected by using the ACF, which realizes the integration of the incident optical path and collecting optical path about optical roughness detection. Because the focused ring light has a smaller spot radius than that of the emergent light of a single-mode fiber, the proposed sensor has a higher spatial resolution. Moreover, the ACF with a cone-frustum tip can reduce the diffuse light coupling into the sensor; in this way, we improve the measurement precision. The experimental results show that for the surface roughness of 10 nanoscales, the error between the measured value and the theoretical value is about 5% and the spatial resolution reaches 6 µm. Thus, our sensor can be widely used in high precision nondestructive surface roughness measurements.

show abstract

A Miniature GaN Chip for Surface Roughness Measurement

Yin

Chen

et al. 2021

IEEE Trans. Electron Devices

View full text Add to dashboard Cite

Laser-based modulation-interference microscopy of optical surfaces

Cited by 3 publications

References 2 publications

Nanoscale surface characterization using laser interference microscopy

Nanoscale surface characterization using laser interference microscopy

High precision roughness sensor based on annular core optical fiber

A Miniature GaN Chip for Surface Roughness Measurement

Contact Info

Product

Resources

About