Laser-based glass soldering for MEMS packaging

Chaminade, Cédric; Olowinsky, Alexander; Kind, Heidrun

doi:10.2351/1.5061145

Cited by 3 publications

(1 citation statement)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Creation of a strong joint of materials that demonstrate different physical and chemical properties is an important step in the development of the technologies for the fabrication of microfluidic devices, microchip lasers, and sensors. The most common bonding methods for glass‐based materials are optical contact, 1 bonding by adhesives 2 and solders, 3 various types of welding, including diffusion welding, 4 laser welding with CO 2 , and solid‐state lasers, 5 anodic bonding 6 . All these methods have a number of disadvantages and limitations that stimulate the search for new approaches to effective materials joining.…”

Section: Introductionmentioning

confidence: 99%

Local and high‐strength joining of transparent glass and glass‐ceramics by femtosecond Bessel beam

et al. 2023

View full text Add to dashboard Cite

The creation of robust joint between different materials with notably different coefficients of thermal expansion (CTE) is an urgent task for the development of the engineering, laser technology and aerospace industry. In this regard, femtosecond laser welding is a promising technique for efficient adhesion‐free bonding of transparent materials. This paper reports on the laser welding of laser phosphate glass (CTE = 110·10−7 K−1) and spinel‐based glass‐ceramic (CTE = 50·10−7 K−1) by the Bessel beam. Dependencies of weld geometric parameters on the pulse energy and scanning speed were investigated and the laser exposure conditions were optimized for durable welding. The weld joints were tested on shear strength, which was shown to be as record high as up to 147 MPa. Atomic force microscopy, Raman spectroscopy and elemental analysis were used to investigate the structure and morphology of the weld after its fracture, which revealed the laser‐induced amorphization of glass‐ceramics and the formation of strong interconnection by laser‐driven mutual diffusion of two glassy phases. The results demonstrate the prospects for using femtosecond lasers for efficient industrial welding of a wide range of materials.This article is protected by copyright. All rights reserved

show abstract

Section: Introductionmentioning

confidence: 99%

Local and high‐strength joining of transparent glass and glass‐ceramics by femtosecond Bessel beam

et al. 2023

View full text Add to dashboard Cite

show abstract

Experiment-Based Quantitative Analysis of Picosecond Pulse-Induced Morphological Changes in Fused Silica

Yan

Wang

Shen

2018

Journal of Micro and Nano-Manufacturing

View full text Add to dashboard Cite

Due to its excellent quality, fused silica has been widely used in various industrial applications. The nonlinear absorptive nature of ultrafast laser pulses enables the induction of morphological changes within the bulk transparent materials. In this study, the interior modification of fused silica is induced by a picosecond pulsed laser, and the relationship between processing parameters and the modification geometry is demonstrated. Three different patterns are identified according to the geometric characteristics of the modification. Furthermore, a simple experiment-based model considering the incubation effect is put forward to predict picosecond pulse-induced morphological changes in fused silica.

show abstract