Laser-assisted etching.

Precision Machining Methods for Ceramics

“…Several research results have been reported recently in Japan (Koyabu, 1984;Mihashi, 1985). Figure 13.20 gives an example of yttrium alu minum garnet laser etching equipment.…”

“…Figure 13.20 gives an example of yttrium alu minum garnet laser etching equipment. In addi tion, the ratio of groove depth to groove width occurs in the following as cending order of laser types: CW < single < Q-switched < Q-switched plus single (Koyabu, 1984). In addi tion, the ratio of groove depth to groove width occurs in the following as cending order of laser types: CW < single < Q-switched < Q-switched plus single (Koyabu, 1984).…”