Laser-Assisted Bonding Approach for Photonic Integration Processes
Aleksandr A. Vlasov,
Topi Uusitalo,
Evgenii Lepukhov
et al.
Abstract:Current development trends concerning miniaturizing of electronics and photonics systems are aiming at assembly and 3D co-integration of a broad range of technologies including MEMS, microfluidics, wafer level optics, and silicon photonics. To this end, on-chip integration using siliconphotonics platform offers a wide range of possibilities addressing passive optics functionality, active optoelectronic devices, and compatibility with CMOS fabrication. On the other hand, the hybrid technology enabling volume ma… Show more
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