Laser applications in microtechnology

Gillner, Arnold; Holtkamp, Jens; Hartmann, Claudia; Olowinsky, Alexander; Gedicke, Jens; Klages, Kilian; Bosse, L.; Bayer, Alexander

doi:10.1016/j.jmatprotec.2005.05.049

Cited by 66 publications

(30 citation statements)

References 4 publications

(3 reference statements)

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“…Use of transparent tools such as sapphire guides the laser radiation directly on to the workpiece through the closed tool. The workpiece can be heated in the areas where the material needs to flow during the forming process, while other zones of the material remain cold (Gillner et al, 2005). Experimental investigations have shown that the use of sapphire tools in laser-assisted microforming processes is a suitable method for the production of microparts.…”

Section: Laser-assisted Microformingmentioning

confidence: 99%

See 1 more Smart Citation

Micro- and Nanostructured Surface Development by Nano Plastic Forming and Roller Imprinting

Yoshino¹,

Kurnia²,

Yamanaka³

et al. 2016

Micromanufacturing Processes

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Section: Laser-assisted Microformingmentioning

confidence: 99%

“…• The process can be conveniently and accurately controlled by adjusting laser parameters including laser power and laser beam diameter and processing parameters such as scanning speed of the laser beam (Gillner et al, 2005).…”

Section: Introductionmentioning

confidence: 99%

Micro- and Nanostructured Surface Development by Nano Plastic Forming and Roller Imprinting

Yoshino¹,

Kurnia²,

Yamanaka³

et al. 2016

Micromanufacturing Processes

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“…It can be concluded that for attaining high accuracies and small geometries in the micrometer range, shorter wavelength, e.g., from Nd:YAG lasers and Excimer lasers, have to be used. However some researchers (Gillner et al, 2005) mention that for Nd:YAG lasers the absorption of ceramics is poor and therefore using frequency tripled Nd:Vanadate lasers ablation accuracies of <10 m with surface qualities <1 m can be achieved with sufficient ablation rates for the tooling industry.…”

Section: Machining Of Ceramic Biocompositesmentioning

confidence: 99%

Processing and Laser Micromachining of HAP Based Biocomposites

Benga¹,

Gîngu²,

Ciupitu³

et al. 2010

Engineering the Future

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“…As the first generation of commercial lasers, the CO 2 laser is one of the most widely used gas lasers with a relatively low maintenance cost and high processing speed [7,8], which is advantageous from the deployment point of view. The wavelength of CO 2 laser is in the mid-IR region and is therefore a good source of heat required in thermal or thermal-related applications [9][10][11]. Contrary to mechanical drilling, CO 2 laser micromachining is a non-contact process which depends significantly on the thermal, optical and/or chemical properties of the materials to be processed [12].…”

Section: Introductionmentioning

confidence: 99%

Multi-criteria optimization in CO2 laser ablation of multimode polymer waveguides

Tamrin

Zakariyah

Sheikh

2015

Optics and Lasers in Engineering

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a b s t r a c tHigh interconnection density associated with current electronics products poses certain challenges in designing circuit boards. Methods, including laser-assisted microvia drilling and surface mount technologies for example, are being used to minimize the impacts of the problems. However, the bottleneck is significantly pronounced at bit data rates above 10 Gbit/s where losses, especially those due to crosstalk, become high. One solution is optical interconnections (OI) based on polymer waveguides. Laser ablation of the optical waveguides is viewed as a very compatible technique with ultraviolet laser sources, such as excimer and UV Nd:YAG lasers, being used due to their photochemical nature and minimal thermal effect when they interact with optical materials. In this paper, the authors demonstrate the application of grey relational analysis to determine the optimized processing parameters concerning fabrication of multimode optical polymer waveguides by using infra-red 10.6 mm CO 2 laser micromachining to etch acrylate-based photopolymer (Truemode ™ ). CO 2 laser micromachining offers a low cost and high speed fabrication route needed for high volume productions as the wavelength of CO 2 lasers can couple well with a variety of polymer substrates. Based on the highest grey relational grade, the optimized processing parameters are determined at laser power of 3 W and scanning speed of 100 mm/s.

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Laser applications in microtechnology

Cited by 66 publications

References 4 publications

Micro- and Nanostructured Surface Development by Nano Plastic Forming and Roller Imprinting

Micro- and Nanostructured Surface Development by Nano Plastic Forming and Roller Imprinting

Processing and Laser Micromachining of HAP Based Biocomposites

Multi-criteria optimization in CO2 laser ablation of multimode polymer waveguides

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