1998
DOI: 10.1088/0022-3727/31/19/039
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Laser ablation rate of materials using the generated acoustic waves

Abstract: It is shown that the acoustic waves generated during laser ablation can be used to determine the ablation threshold and the ablation rate for different fluences and depths and also to characterize the different regions of the process. On-line measurement of the individual ablation rate is possible by observation of the delay of the arrival of the acoustic wave to a piezoelectric detector located behind the sample.

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Cited by 15 publications
(7 citation statements)
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“…The ablation rate can be roughly estimated from the optical microscope images and profileometer scans obtained in several sections across the damage area. The ablation rate is dependent on many factors that include the laser parameters, surface conditions, and laser absorption in the plasma [51]. For a laser fluence of 48 J/cm 2 , a rough estimate on the ablation rate is¨0.5 Ag/pulse, while it was¨5 times less for a fluence of 4 J/cm 2 .…”
Section: Sample Ablationmentioning
confidence: 99%
“…The ablation rate can be roughly estimated from the optical microscope images and profileometer scans obtained in several sections across the damage area. The ablation rate is dependent on many factors that include the laser parameters, surface conditions, and laser absorption in the plasma [51]. For a laser fluence of 48 J/cm 2 , a rough estimate on the ablation rate is¨0.5 Ag/pulse, while it was¨5 times less for a fluence of 4 J/cm 2 .…”
Section: Sample Ablationmentioning
confidence: 99%
“…To obtain more insight into the process as a function of the ablation laser fluence, we also monitor the generated AW due to the interaction of the laser pulses with the Cu disc. We implement the AW measurements since proper calibration of the peak-to-peak amplitude allows determining the ablation rate in real-time. ,, Figure B shows a representative AW generated for five laser pulses impacting the disc at a 17.4 J/cm 2 fluence. The peak amplitudes are almost equal in this range, continuing to be so for many pulses and accordingly indicating a similar ablation mechanism for each laser pulse.…”
Section: Resultsmentioning
confidence: 99%
“…In this ablative domain, easily obtained from a pulsed laser in the focus of a lens, when the solid is subjected to thermal and/or mechanical changes, the pattern of sound generation may become complex since nonlinear acoustic emissions arise due to the sudden release of thermal energy [ 37 , 38 , 39 , 40 ]. In any case, these laser-generated acoustic transients have become a promising tool for monitoring and control the ablation process from fundamental properties like the stress power (laser energy coupling to the solid target) [ 41 ], the plasma formation mechanism and its evolution dynamics [ 42 , 43 ] and the ablation rate [ 44 , 45 , 46 ], as well as for standardizing the retrieved analytical signal via normalization of optical emissions [ 47 , 48 ].…”
Section: Introductionmentioning
confidence: 99%