2002
DOI: 10.1117/12.482093
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Laser ablation of a triazene polymer studied by ns-interferometry and shadowgraphy

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Cited by 7 publications
(8 citation statements)
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“…The dynamic behavior of the etching process was also investigated. Hauer et al studied the ablation of triazene group polymers and PI reference films using XeCl (308 nm) and ArF (193 nm) lasers using nanosecond interferometry and shadowgraphy . Similar to Lippert et al , they reported the absence of surface swelling and the presence of a shock wave.…”
Section: Polymer Materialsmentioning
confidence: 92%
“…The dynamic behavior of the etching process was also investigated. Hauer et al studied the ablation of triazene group polymers and PI reference films using XeCl (308 nm) and ArF (193 nm) lasers using nanosecond interferometry and shadowgraphy . Similar to Lippert et al , they reported the absence of surface swelling and the presence of a shock wave.…”
Section: Polymer Materialsmentioning
confidence: 92%
“…This method focuses on the structuring of the remaining polymer and is therefore used mostly in the lower fluence range (at fluences above 1 J cm À2 , the ablation rates are in most cases, quite high, making the data evaluation very difficult). Previous studies using this technique have shown that some polymers exhibit a pronounced swelling and a delayed material removal [12,13], whereas other polymers revealed structuring without swelling [14][15][16][17].…”
Section: Introductionmentioning
confidence: 99%
“…When laser ablation occurs in an atmosphere, the instantaneous released energy will form a shockwave, which is visible in the shadowgraphy images. The propagation speed of the shockwave may be applied as an indicator for the amount of gaseous products [15] and for the energy [20], which is released during the ablation process.…”
Section: Introductionmentioning
confidence: 99%
“…The results of the analysis are phase shift information that correspond to ablation or swelling while the amplitude information is equal to changes of the reflectivity. Interferometric images of TP at 193, 30862,65 and 351 nm64 show that etching of the film begins and ends with the laser pulse (shown in Figure 22 for 308 nm irradiation). In contrast, corresponding images of polyimide for irradiation at 351 nm reveal pronounced swelling, followed by material removal that persists for several µs after the laser pulse 41,42…”
Section: Discussionmentioning
confidence: 99%