Large-stroke low-profile single-crystal piezoelectric actuators

Jiang, Xiaoning; Rehrig, Paul W.; Hackenberger, Wesley S.; Shrout, Thomas R.

doi:10.1117/12.484199

Cited by 4 publications

(5 citation statements)

References 10 publications

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“…Maximum microstrains of 886 (@ 15 kV/cm) have been reported with the PZN-PT single crystal IDE devices, compared with 250 microstrain (@ 8 kV/cm) from the IDE devices using PZT5A. 413 Displacement >50 lm was reported in 20 mm long single crystal stack actuators with low dielectric loss (<0.1%) and low hysteresis under the driving field of 14 kV/cm, while in-plane stroke of 24 lm has been achieved…”

Section: Stack/in-plane Actuatorsmentioning

confidence: 91%

“…Both actuators showed fast response time, being 0.1-0.15 msec. Furthermore, the stroke of the flextensional actuators was found to remain >60% of the room temperature values at a cryogenic temperature of $70 K. 406,413…”

Section: Flextensional Actuatorsmentioning

confidence: 91%

“…186 Numerous types of piezoelectric actuators have been developed, including in-plane actuators, stack actuators, benders, flextensional actuators, ultrasonic motors (resonant actuators), etc. [405][406][407][408][409][410][411][412][413][414][415][416][417][418][419][420][421][422] The state-of-art materials for off-resonance actuators are soft PZT ceramics, which possess piezoelectric strain coefficients up to 33 being in the range of $1500 pC/N to $2800 pC/N, depending on compositions. Of particular significance is that the high field d 33 * of PMN-PT crystals are found to be similar to the small signal values, with strain-field hysteresis less than 5%, much smaller than that of soft PZTs, whose hysteresis values are about >40%.…”

Section: Actuatorsmentioning

confidence: 99%

“…Stack actuators are featured with amplified stroke (each layer stroke times the number of layers) and high blocking force, while in-plane actuation mostly adopts the transverse mode to generate motion in plane. [405][406][407][408][409][410][411][412][413] Stroke output of a stack actuator is given by the following formula:…”

Section: Stack/in-plane Actuatorsmentioning

confidence: 99%

“…are well known with low profile and large stroke due to the compliance amplification mechanism, but their force output is low compared to stack actuators. 186,199,[406][407][408][409]412,413 Two different piezoelectric drivers can be used for flextensional actuators (cymbal type). Figure 52 (left) shows a typical "31" mode flextensional actuators, where the driving element is a piezoelectric plate and its horizontal "31" strain will be amplified into vertical actuation, while Figure 52 (right) gives the "33" mode flextensional actuators, where the stack actuator is inserted into a thin metal frame (amplification mechanism).…”

Section: Flextensional Actuatorsmentioning

confidence: 99%

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High performance ferroelectric relaxor-PbTiO3 single crystals: Status and perspective

Zhang

2012

Journal of Applied Physics

709

618

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Ferroelectrics are essential components in a wide range of applications, including ultrasonic transducers, sensors, and actuators. In the single crystal form, relaxor-PbTiO3 (PT) piezoelectric materials have been extensively studied due to their ultrahigh piezoelectric and electromechanical properties. In this article, a perspective and future development of relaxor-PT crystals are given. Initially, various techniques for the growth of relaxor-PT crystals are reviewed, with crystals up to 100 mm in diameter and 200 mm in length being readily achievable using the Bridgman technique. Second, the characterizations of dielectric and electromechanical properties are surveyed. Boundary conditions, including temperature, electric field, and stress, are discussed in relation to device limitations. Third, the physical origins of the high piezoelectric properties and unique loss characteristics in relaxor-PT crystals are discussed with respect to their crystal structure, phase, engineered domain configuration, macrosymmetry, and domain size. Finally, relaxor-PT single crystals are reviewed with respect to specific applications and contrasted to conventional piezoelectric ceramics.

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Section: Stack/in-plane Actuatorsmentioning

confidence: 91%

Section: Flextensional Actuatorsmentioning

confidence: 91%

Section: Actuatorsmentioning

confidence: 99%

Section: Stack/in-plane Actuatorsmentioning

confidence: 99%

Section: Flextensional Actuatorsmentioning

confidence: 99%

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High performance ferroelectric relaxor-PbTiO3 single crystals: Status and perspective

Zhang

2012

Journal of Applied Physics

709

618

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Piezoelectric property of relaxor-PbTiO₃ crystals under uniaxial transverse stress

Zhang

Taylor

et al. 2013

Appl. Phys. Lett.

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Single Crystal Piezoelectric Actuators for Advanced Deformable Mirrors

et al. 2004

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In this paper, single crystal piezoelectric actuators are developed and demonstrated as a means of increasing actuator authority while maintaining strain precision for adaptive optics used large throw deformable mirror applications. Single crystal (PMN-PT crystal) stack actuators with foot print size of 5 mm × 5 mm and height varied from 16 mm to 21 mm have been designed, fabricated and tested. The actuation stroke larger than 50 μm is obtained under driving electric field of 15 KV/cm for single crystal stack actuators. In-plane actuation stroke is about 25 μm under 8KV/cm for single crystal plate actuators. The characterization results show that the single crystal piezoelectric actuators hold enhanced stroke and coupling coefficient (>0.83) under lower driving field comparing with PZT counterpart, while keep the nature of piezoelectric actuations with high precision, high resolution, fast response under high preload stress. The potential benefits of incorporating these actuators in a deformable mirror (DM) design were demonstrated by system modeling using the Integrated Optical Design Analysis Software (IODA) developed by SRS. The modeling shows that low order aberrations with peak to valley errors as large as 40 microns could be corrected to diffraction limited performance with a reasonable number of actuators and acceptable actuator forces and face sheet stresses. In the case of DM correction with 20 microns of 1st-Order Astigmatism-X error (Peak to valley: 38.74 μm, RMS error: 8.13 μm), the corrected wavefront error was reduced to PV of 0.26 μm and RMS error of 0.024 μm, which suggest promise for large throw DM applications.

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Large-stroke low-profile single-crystal piezoelectric actuators

Cited by 4 publications

References 10 publications

High performance ferroelectric relaxor-PbTiO3 single crystals: Status and perspective

High performance ferroelectric relaxor-PbTiO3 single crystals: Status and perspective

Piezoelectric property of relaxor-PbTiO₃ crystals under uniaxial transverse stress

Single Crystal Piezoelectric Actuators for Advanced Deformable Mirrors

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Large-stroke low-profile single-crystal piezoelectric actuators

Cited by 4 publications

References 10 publications

High performance ferroelectric relaxor-PbTiO3 single crystals: Status and perspective

High performance ferroelectric relaxor-PbTiO3 single crystals: Status and perspective

Piezoelectric property of relaxor-PbTiO3 crystals under uniaxial transverse stress

Single Crystal Piezoelectric Actuators for Advanced Deformable Mirrors

Contact Info

Product

Resources

About

Piezoelectric property of relaxor-PbTiO₃ crystals under uniaxial transverse stress