2015
DOI: 10.1364/oe.23.013580
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Large-scale two-dimensional MoS_2 photodetectors by magnetron sputtering

Abstract: We report on the demonstration of photodetectors based on large scale two-dimensional molybdenum disulfide (MoS2) transition metal dichalcogenides. Excellent film uniformity and precise control of the MoS2 thickness down to a monolayer (~0.75nm) were achieved by magnetron sputtering synthesis approach. In particular, the photodetectors integrated with five MoS2 monolayers exhibit a high photoresponsivity of 1.8 A/W, an external quantum efficiency exceeding 260%, and a photodetectivity of ~5 x 10(8) Jones for a… Show more

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Cited by 102 publications
(64 citation statements)
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“…The device exhibits an obvious photocurrent/dark current ratio of ≈10, even at 200 °C. MoS 2 nanosheets prepared from other methods, such as liquid exfoliation, magnetron sputtering, and solution synthesis have also been employed in photodetectors. However, these devices usually exhibit inferior responsivities to their counterparts based on mechanically‐exfoliated or CVD‐grown MoS 2 .…”
Section: Photoconductors/phototransistors Based On 2d Layered Semiconmentioning
confidence: 99%
“…The device exhibits an obvious photocurrent/dark current ratio of ≈10, even at 200 °C. MoS 2 nanosheets prepared from other methods, such as liquid exfoliation, magnetron sputtering, and solution synthesis have also been employed in photodetectors. However, these devices usually exhibit inferior responsivities to their counterparts based on mechanically‐exfoliated or CVD‐grown MoS 2 .…”
Section: Photoconductors/phototransistors Based On 2d Layered Semiconmentioning
confidence: 99%
“…Remarkably, the layered black phosphorous (BP) material can be reduced to one single atomic layer in the vertical direction as a result of its van der Waals structure. The monolayer of BP, known as phosphorene, exhibits physical properties that can be significantly different from those of its bulk counterpart 16. Phosphorene has changed the landscape of many research areas in science and technology, particularly in condensed matter physics, and it has received much attention recently for its use as the base component of novel nanodevices, e.g., transistors, nanomechanical resonators, photovoltaics, photodetectors, batteries and sensors 9, 10, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37…”
Section: Introductionmentioning
confidence: 99%
“…The monolayer of BP, known as phosphorene, exhibits physical properties that can be significantly different from those of its bulk counterpart. [16] Phosphorene has changed the landscape of many research areas in science and technology, particularly in condensed matter physics, and it has received much attention recently for its use as the base component of novel nanodevices, e.g., transistors, nanomechanical resonators, photovoltaics, photodetectors, batteries and sensors. [9,10, The important challenge in realizing phosphorene devices is caused by its strong reaction with oxygen and water and so it should be well-protected from degradation by encapsulating or sandwiching between different materials.…”
Section: Introductionmentioning
confidence: 99%
“…In particular, atomically thin molybdenum disulphide (MoS 2 ) films, which have a thickness-dependent optical bandgap ranging from 1.3 eV (bulk, indirect) to 1.8 eV (monolayer, direct) 4 , a quasiparticle bandgap of 2.84 eV 5 and spin-orbit splitting 6 , have been investigated as one of the most promising TMDCs for next-generation electronic and optoelectronic applications, such as transistors 79 , photodetectors 10 , and solar cells 11 . However, a direct growth technique needs to be developed that is compatible with conventional silicon technology and can be integrated with flexible substrates at sufficiently low temperature to extend the applicability of MoS 2 films to various electronic devices.…”
Section: Introductionmentioning
confidence: 99%