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Cited by 38 publications
(53 citation statements)
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“…We fabricate the reconfigurable MDM-WDM silicon microring resonators on a 250 nm SOI wafer with 3 mm of buried oxide using standard CMOS fabrication processes. We patterned the waveguides using e-beam lithography with the dimensions as followed: the input/output ports and the microring are 450 nm wide; the TE 0 , TE 1 evaporated on the microring resonators above the cladding to create the 1-mmwide heaters. Finally, 500 nm of gold (Au) are evaporated to define the electrical wires and contact pads using a lift-off process.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…We fabricate the reconfigurable MDM-WDM silicon microring resonators on a 250 nm SOI wafer with 3 mm of buried oxide using standard CMOS fabrication processes. We patterned the waveguides using e-beam lithography with the dimensions as followed: the input/output ports and the microring are 450 nm wide; the TE 0 , TE 1 evaporated on the microring resonators above the cladding to create the 1-mmwide heaters. Finally, 500 nm of gold (Au) are evaporated to define the electrical wires and contact pads using a lift-off process.…”
Section: Methodsmentioning
confidence: 99%
“…C urrent-integrated photonics operate almost exclusively in the single-mode regime and utilize wavelength-division multiplexing (WDM) 1,2 , which supports limited scalability in bandwidth density. In contrast, fibre communications are increasingly targeting multimode operation in conjunction with WDM to further scale the communication bandwidth transmitted per fibre 3 .…”
mentioning
confidence: 99%
“…By combining components that generate, detect and otherwise control light, PICs facilitate design of photonic architectures that prove far more powerful than any single photonic element alone. Already, they have sparked great interest for communications and computing technology 3,4 . Other rapidly emerging applications meanwhile include light detection and ranging 5 , optofluidics 6 and more.…”
mentioning
confidence: 99%
“…Promisingly, recent rapid advances of high-index-contrast waveguides, that is, silicon-on-insulator (SOI), silicon nitride (Si 3 N 4 ), and indium phosphide (InP), have successfully yielded many functions as standard building blocks for creating compact high-performance PICs. Besides, the constant improvement of fabrication maturity points toward large-scale integration of thousands of these functions with high-performance uniformity and repeatability [35][36][37].…”
Section: Introductionmentioning
confidence: 99%