Large‐Scale Manufacturing of Polymer Planarization Layers

Moro, L.; Hauf, Christopher R.

doi:10.1002/msid.1194

Cited by 4 publications

(4 citation statements)

References 11 publications

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“…Both the epoxy ink and particle-containing UV curable ink used in this study resulted in better thin film uniformities than the standard TFE ink. The choice of ink is a multi-faceted issue [1]. Inks must have good jettability properties, in particular at high frequency rates, and deliver the correct film formation and physical properties for the required application.…”

Section: Printhead Drop Sizementioning

confidence: 99%

“…Requirements for the film deposition are getting more varied in terms of film thickness range, printed topology and variety of inks to be used. [1] Kateeva as the leading supplier of TFE inkjet printing tools to the OLED industry is uniquely positioned to enable a wide range of applications. The modularity and flexibility of our tools allows us to quickly adapt to new requirements.…”

Section: Introductionmentioning

confidence: 99%

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33‐3: Invited Paper: Research and Applications of Inkjet Printing for OLED Mass Production

Gassend¹,

Hauf²,

Chen³

2022

Symp Digest of Tech Papers

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OLEDs (organic light‐emitting diode) are one of the prevalent display technologies and their penetration in the consumer electronic market is fast growing. As a reliable and cost‐effective deposition technique for polymeric planarization layers, inkjet printing has been successfully applied to the mass production of flexible OLED displays. In this paper, we present the concept that for today's common ranges of process layer thickness, the quality and consistency of the deposited polymeric film can be agnostic to the selection of drop volumes. However, printer flexibility in terms of drop size and printhead support is critical to meeting the full range of current and future processes adopting the proven inkjet printing process. Applications utilizing the state‐of‐the‐art Kateeva inkjet printing systems are presented to demonstrate our study and for the reader to be able to assess if inkjet technology could be advantageous for a particular OLED application.

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Section: Printhead Drop Sizementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

33‐3: Invited Paper: Research and Applications of Inkjet Printing for OLED Mass Production

Gassend¹,

Hauf²,

Chen³

2022

Symp Digest of Tech Papers

Self Cite

View full text Add to dashboard Cite

show abstract

“…As the inorganic thin films, silicon nitride 12 or aluminum oxide 5 , 6 , 8 , 13 grown by plasma-enhanced chemical vapor deposition (PECVD) or atomic layer deposition (ALD) method is mainly used. On the other hand, as the organic thin films, polymers by wet coating such as inkjet printing 14 or dry coating such as thermal or plasma polymerization 5 , 6 , 15 are generally utilized.…”

Section: Introductionmentioning

confidence: 99%

“…In this respect, sidewall patterning of organic–inorganic multilayer TFE is becoming increasingly important not only to implement a thin bezel, but also to block moisture ingress through the sides around the TFE structure. Currently, for the sidewall patterning of the TFE, liquid-phase inkjet printing and vapor-phase deposition through a shadow mask are used for organic and inorganic thin films, respectively 3 , 4 , 10 , 14 . However, inkjet printing of organic layers has a disadvantage in that the process speed is slow, and vapor deposition of inorganic layers using a shadow mask also has a disadvantage in that it is difficult to create sharp pattern edges, and thus further process improvement is required.…”

Section: Introductionmentioning

confidence: 99%

Sidewall patterning of organic–inorganic multilayer thin film encapsulation by adhesion lithography

Lee,

Cho,

Jang

et al. 2023

Sci Rep

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A simple sidewall patterning process for organic–inorganic multilayer thin-film encapsulation (TFE) has been proposed and demonstrated. An Al2O3 thin film grown by atomic layer deposition (ALD) was patterned by adhesion lithography using the difference in interfacial adhesion strength. The difference in interfacial adhesion strength was provided by the vapor-deposited fluoro-octyl-trichloro-silane self-assembled monolayer (SAM) patterns formed by a shadow mask. The sidewall patterning of multilayer TFE was shown possible by repeating the adhesion lithography and the vapor deposition of organic polymer and SAM patterns using shadow masks. The proposed process has the advantage of being able to pattern the blanket ALD-grown Al2O3 thin films by adhesion lithography using a SAM pattern that can be more accurately predefined with a shadow mask.

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Micro multi-nozzle jet coating of organic thin film for organic light-emitting diode lighting devices

Shin

Kang

Cho

et al. 2021

Micro and Nano Syst Lett

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Uniform deposition across large areas of an organic layer is one of the challenges for the industrial application of solution-based organic light‐emitting diode (OLED). In this paper, we propose an organic thin film deposition method for OLED using a micro multi-nozzle jet coating process. The developed micro multi-nozzle jet head consists of eighteen nozzles (100 μm diameter), a side suction line, inlets, and a nozzle protection outer hole. To demonstrate organic thin film deposition for OLED lighting device fabrication, a poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) solution was used as a hole injection layer (HIL). Thickness uniformity of the PEDOT:PSS thin film was analyzed by regulating the jetting pressure. Through single-path coating of twelve successive stable column-jet flows, PEDOT:PSS organic film of 26 mm width was coated on an ITO substrate at 1 m/s head speed. The PEDOT:PSS thin film of 24.25 ± 1.55 nm (CV = 6.39%) thickness was obtained by the proposed coating method. For the feasibility test, OLED lighting devices with emission areas of 20 mm × 20 mm and 70 mm × 70 mm were successfully fabricated using PEDOT:PSS films deposited by a micro multi-nozzle jet coating method.

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Large‐Scale Manufacturing of Polymer Planarization Layers

Abstract: Polymeric planarization layers play a pivotal role in OLED displays’ thin‐film encapsulation. With its low material consumption, deposition geometry flexibility, high throughput, and reliability, inkjet printing is the preferred deposition technology for such films.

Cited by 4 publications

References 11 publications

33‐3: Invited Paper: Research and Applications of Inkjet Printing for OLED Mass Production

33‐3: Invited Paper: Research and Applications of Inkjet Printing for OLED Mass Production

Sidewall patterning of organic–inorganic multilayer thin film encapsulation by adhesion lithography

Micro multi-nozzle jet coating of organic thin film for organic light-emitting diode lighting devices

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