2016
DOI: 10.1088/1674-1056/25/11/118105
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Large scale fabrication of nitrogen vacancy-embedded diamond nanostructures for single-photon source applications

Abstract: Color centers in diamond are prominent candidates to generate and manipulate quantum states of light, even at room temperature. However, the efficiency of photon collection efficiency in bulk diamond is greatly reduced by the refraction at diamond/air interface. To address this issue, arrays of diamond nanostructures of different diameters and top end shapes have been fabricated with HSQ, PMMA and Cr as the etching masks, towards large scale fabrication of nitrogen vacancy (NV) embedded diamond single photon s… Show more

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Cited by 14 publications
(11 citation statements)
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References 32 publications
(72 reference statements)
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“…To manufacture nanophotonic structures, two fundamentally different approaches exist: first, the structures can be sculpted from bulk diamond material (top-down approach) as discussed above [41,82,84,105,108]. In contrast, nanostructures might also be created directly during (CVD) synthesis of diamond (bottom up approach [100, 114,115]).…”
Section: Nanostructures For Photonics and Scanning Probe Operationmentioning
confidence: 99%
“…To manufacture nanophotonic structures, two fundamentally different approaches exist: first, the structures can be sculpted from bulk diamond material (top-down approach) as discussed above [41,82,84,105,108]. In contrast, nanostructures might also be created directly during (CVD) synthesis of diamond (bottom up approach [100, 114,115]).…”
Section: Nanostructures For Photonics and Scanning Probe Operationmentioning
confidence: 99%
“…Lithographically-defined etch masks are used to create the pillars, as illustrated in Figure 6b. These masks undergo faceting and erosion [108], thus limiting the pillar length and influencing its shape. For an electron microscopy image of diamond nanopillars, see Figure 6c.…”
Section: Nanostructures For Photonics and Scanning Probe Operationmentioning
confidence: 99%
“…To manufacture nanophotonic structures, two fundamentally different approaches exist: first, the structures can be sculpted from bulk diamond material (top-down approach) as discussed above [41,82,84,105,108]. In contrast, nanostructures might also be created directly during (CVD) synthesis of diamond (bottom up approach [100,114,115]).…”
Section: MMmentioning
confidence: 99%
“…The electronic structure also allows quantum sensing of magnetic or electric fields as well as temperature . Coupling and emission enhancements can be achieved with the help of so‐called microcavities, like nanopillars or photonic structures . All these experiments require the precise placement of NV centers.…”
Section: Introductionmentioning
confidence: 99%