Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer

Zhang, Ming; Ni, Chang; Zhu, Yu; Wang, Leijie; Hu, Chuxiong; Hu, Jinchun

doi:10.3788/col201715.101201

Cited by 3 publications

(1 citation statement)

References 10 publications

(29 reference statements)

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“…We focus on studying DFMI, a technique that has recently gained wide interest [19][20][21][22]. Compared with the classic heterodyne scheme or homodyne quadrature interferometry [3], DFMI requires fewer optical components, which allows for more compact layouts without giving up the multifringe capabilities.…”

Section: Introductionmentioning

confidence: 99%

Compact Multifringe Interferometry with Subpicometer Precision

et al. 2019

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Deep-frequency-modulation interferometry combines optical minimalism with multifringe readout. However, precision is key for applications such as optical gradiometers for satellite geodesy or as dimensional sensors for ground-based gravity experiments. We present a single-component interferometer smaller than a cubic inch. Two of these are compared to each other to demonstrate tilt and displacement measurements with a precision of less than 20 nrad/ √ Hz and 1 pm/ √ Hz at frequencies below 1 Hz.

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Section: Introductionmentioning

confidence: 99%

Compact Multifringe Interferometry with Subpicometer Precision

et al. 2019

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Eightfold optical encoder with high-density grating

et al. 2018

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A novel grating interferometer configuration with eightfold optical subdivision to achieve ultrahigh resolution using a special symmetrical prism is proposed. The optical subdivision is enhanced by four times compared to traditional linear optical encoders. In this work, we take advantage of a high linear density grating of 1780 lines/mm, which is combined with an eightfold optical subdivision configuration. As a result, a high resolution of 68.6 pm is achieved. The apparatus adopts a symmetrical measurement configuration to reduce the error arising from environmental fluctuations. The verification experiments involve high optical subdivision, long- and short-range displacement measurement, and stability, with all results compared to those obtained with a commercial interferometer. The excellent agreement of the results demonstrates the effectiveness of our proposed system.

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Optical interference phase control method with single photodetector for interference lithography

Cao,

Lu,

Yang

et al. 2023

Opt. Express

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This study designs an optical phase control method for interference lithography system accompanied with severe disturbance. The system, which is designed based on the exponential reaching law of sliding mode control(SMCE), could adjust the interference phase with single photodetector. The model of system is derived and then the stability is proved through Lyapunov theorem. This paper also analyzes the behavior of the system under different reference voltages of photodetector. Both theoretical analysis and simulation experiment results suggest that this method can non-periodically achieve interference phase control with single photodetector by the switching module. Finally, the experimental device is set up, and the superiority of the SMCE method in transient response time and disturbance-resisting ability is demonstrated compared with the proportional–integral–derivative(PID) method.

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Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer

Cited by 3 publications

References 10 publications

Compact Multifringe Interferometry with Subpicometer Precision

Compact Multifringe Interferometry with Subpicometer Precision

Eightfold optical encoder with high-density grating

Optical interference phase control method with single photodetector for interference lithography

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