2018
DOI: 10.1088/1361-6439/aab372
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Large membrane deflection via capillary force actuation

Abstract: Experimental results from six prototype devices demonstrate that pressure changes induced in a liquid bridge via electrowetting can generate large deflections (20–75 µm) of an elastomeric membrane similar to those used in lab-on-a-chip microfluidic devices. In all cases deflections are obtained with a low voltage (20 V) and very small power consumption (<1 µW). The effects of variations in the bridge size and membrane dimensions on measured displacements are examined. Theoretical predictions are in good agreem… Show more

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Cited by 3 publications
(11 citation statements)
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References 25 publications
(40 reference statements)
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“…As the results demonstrate, capillary pressure changes due to electrowetting are an effective means for the generation of membrane movement in microdevices, even when electrowetting occurs on only one surface and not that containing the membrane. The displacements obtained (5–15 μm), like those found in a previous investigation of dual-active-surface devices [ 6 ], were significantly larger than those earlier achieved by electrostatic actuation using much higher voltage and power [ 4 ]. This paper’s single-active-surface results opens up a range of possible variations in actuator design.…”
Section: Discussionsupporting
confidence: 76%
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“…As the results demonstrate, capillary pressure changes due to electrowetting are an effective means for the generation of membrane movement in microdevices, even when electrowetting occurs on only one surface and not that containing the membrane. The displacements obtained (5–15 μm), like those found in a previous investigation of dual-active-surface devices [ 6 ], were significantly larger than those earlier achieved by electrostatic actuation using much higher voltage and power [ 4 ]. This paper’s single-active-surface results opens up a range of possible variations in actuator design.…”
Section: Discussionsupporting
confidence: 76%
“…The membrane displacements obtained for single-active-surface devices are about half of those obtained by their dual active surface counterparts [ 6 ], as predicted by theory [ 10 ]. Just as experiments with those actuators demonstrated, significant improvements in the deflection performance of single-active-surface devices can be achieved by decreasing bridge height.…”
Section: Discussionmentioning
confidence: 81%
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