2017
DOI: 10.1364/oe.25.025894
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Large-format platinum silicide microwave kinetic inductance detectors for optical to near-IR astronomy

Abstract: We have fabricated and characterized 10,000 and 20,440 pixel Microwave Kinetic Inductance Detector (MKID) arrays for the Dark-speckle Near-IR Energy-resolved Superconducting Spectrophotometer (DARKNESS) and the MKID Exoplanet Camera (MEC). These instruments are designed to sit behind adaptive optics systems with the goal of directly imaging exoplanets in a 800-1400 nm band. Previous large optical and near-IR MKID arrays were fabricated using substoichiometric titanium nitride (TiN) on a silicon substrate. Thes… Show more

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Cited by 64 publications
(60 citation statements)
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“…6 It has ten niobium coplanar waveguide feedlines and a 20,440 pixel platinum silicide MKID array multiplexed over 4 to 8 GHz. 1 Each pixel is a lumped element resonator, capacitively coupled to one of the feedlines. A microscope image of a pixel is shown in the inset of figure 1.…”
Section: Dbmentioning
confidence: 99%
“…6 It has ten niobium coplanar waveguide feedlines and a 20,440 pixel platinum silicide MKID array multiplexed over 4 to 8 GHz. 1 Each pixel is a lumped element resonator, capacitively coupled to one of the feedlines. A microscope image of a pixel is shown in the inset of figure 1.…”
Section: Dbmentioning
confidence: 99%
“…The resonators are placed at a 236 µm pitch, and each has a 40 µm × 40 µm inductor and a 100 µm × 130 µm capacitor-a similar design to that used in our current full-scale instruments. 19 Gold wire bonds connect gold pads on the perimeter of the 2.5 mm × 16.5 mm chip to its light-tight device box to improve thermalization.…”
mentioning
confidence: 99%
“…19 Tungsten was unavailable in our deposition system, so we used chromium as the hafnium capping layer to fabricate a 20 440 pixel MEC-style array. 19 Other potential capping materials were investigated, and more details can be found in the appendices. To adjust the film impedance to the MEC design, the hafnium film thickness was increased to 200 nm.…”
mentioning
confidence: 99%
“…Since that time, the Mazin Lab have fielded further instruments focused on the application to exoplanet direct imaging, with arrays of up to 20,000 pixels [4,9]. These instruments contain UVOIR MKID arrays that use PtSi [10] as the superconductor. They have, however, been shown to have energy resolutions an order of magnitude or more below the maximum energy resolution for such a material.…”
Section: Status Of the Technologymentioning
confidence: 99%