Large flow rate/high frequency microvalve array for high performance actuators

Lee, Dong Gun; Shin, Dongsuk D.; Carman, Gregory P.

doi:10.1016/j.sna.2006.06.036

Cited by 16 publications

(14 citation statements)

References 13 publications

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“…Compared with the cantilever valve, the plate valve is fixed in the surrounding area [5][6][7][8]. This fixed form makes the execution part of the valve more flat, the valve is offset under the pressure difference, and the direction of the flow is controlled.…”

Section: Plate Valvementioning

confidence: 99%

Development of Passive Check Valves for Piezoelectric Pump

Yang¹,

Xiao-feng²

2018

Topics in Chemical &Amp; Material Engineering

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In order to make the piezoelectric pump work well, it is necessary to reasonably select the passive check valve for the pump. The pressure difference between the two sides of the valve body is very small when the piezoelectric vibrators are powered, so the opening pressure of the valve must be very low. In this paper, in the past research on piezoelectric pump, several commonly used passive check valves for piezoelectric pump, such as cantilever valve, plate valve, dual cantilever valve and bivalvular valve, are introduced. The structure characteristics of various valves and the advantages and disadvantages in the working process are analyzed, which provides reliable data for the further design of the piezoelectric pump in the selection of valve bod.

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Section: Plate Valvementioning

confidence: 99%

Development of Passive Check Valves for Piezoelectric Pump

Yang¹,

Xiao-feng²

2018

Topics in Chemical &Amp; Material Engineering

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“…These single reed-type valves enabled increased performance up to several hundred hertz. In order to expand the performance into the kilohertz range, miniature check valves have been developed [12][13][14][15]. Smaller valves are designed with less mass to increase the frequency response, with multiple valves arranged in an array to decrease flow resistance losses.…”

Section: Smasis2012-8253mentioning

confidence: 99%

Performance Modeling of a Smart Material Hydraulic Actuator

Larson

Dapino

2012

Volume 2: Mechanics and Behavior of Active Materials; Integrated System Design and Implementation; Bio-Inspired Materials and S

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Smart Material Hydraulic Actuators (SMEHAs) allow high-energy-density materials, such as piezoelectrics and magnetostrictives, to be used to develop compact, high-power actuators. Hydraulic rectification using check valves converts the high-frequency, small-displacement motion of a smart material to large displacements of a hydraulic actuator. In this paper, the performance of a magnetostrictive actuator is evaluated over a range of input frequencies and loading conditions and compared to model results of the overall system. The system’s dynamic performance is found to depend highly on the response of both the check valves used to rectify the motion of the smart material driver and the fluid system, including the passages connecting the smart material pump to the output hydraulic cylinder. Using AMESim, a model is developed for the response of the system and compared to experimental results.

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“…When the pump discharges liquid, the hysteresis of opening the outlet valve reduces the amount of liquid discharged from the pump chamber, and the hysteresis of closing the inlet valve makes the liquid in the pump chamber return to the inlet pipe again. Researchers have been committed to designing valves with high-frequency response to solve this problem [ 12 , 13 , 14 , 15 , 16 ]. The existing research in this field has become mature, and the response frequency of some high-frequency valves reachs over 1 kHz.…”

Section: Introductionmentioning

confidence: 99%

A Theoretical and Experimental Study of a Piezoelectric Pump with Two Elastic Chambers

Zhao

Guo

2020

Sensors

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The paper is a continuation of our work on the dynamic load in piezoelectric pumps. In the study, the dynamic load of liquid in the pipelines was proposed as a key factor that limits the output performance of piezoelectric pumps. To decrease the dynamic load, a piezoelectric pump with two elastic chambers was proposed in our previous published work. In this paper, the performance and key parameters of the piezoelectric pump with two elastic chambers were studied through theoretical analyses and experimental tests. After establishing the mathematical model of the piezoelectric pump with two elastic chambers, the paper theoretically analyzed the performance of the pump and the effect of different structural parameters on the performance. Then prototypes with a range of structural parameters were developed and tested. As revealed from the test results, the elastic chamber effectively decreased the dynamic load of the liquid in the pipelines and the flow rate of the prototype with two elastic chambers was higher than that of the prototype with one or no elastic chamber. However, the elastic chamber did not lead to the increase in the maximum output backpressure of the prototype. Adopting an elastic diaphragm exhibiting a smaller stiffness or a larger diameter could help decrease the dynamic load of the liquid. The elastic chamber more significantly impacted the flow rate of the piezoelectric pump with long pipelines. The pump chamber height had a significant effect on the output performance of the piezoelectric pump with two elastic chambers, which is consistent with the conventional piezoelectric pump. At the height of 0.2 mm, the flow rate of the prototype with two elastic chambers was peaked at 7.7 mL/min; at the height of 0.05 mm, the output backpressure reached the highest of 28.2 kPa. The dynamic load could decrease the amplitude of the piezoelectric vibrator, whereas the prototype with two elastic chambers could effectively reduce the impact of dynamic load on the piezoelectric vibrator. The flow rate decreased almost linearly with the backpressure. Under the same backpressure, the flow rate of the prototype with two elastic chambers was higher than that of the prototype without elastic chamber, and the flow rate difference between the two prototypes gradually decreased with the backpressure.

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Large flow rate/high frequency microvalve array for high performance actuators

Cited by 16 publications

References 13 publications

Development of Passive Check Valves for Piezoelectric Pump

Development of Passive Check Valves for Piezoelectric Pump

Performance Modeling of a Smart Material Hydraulic Actuator

A Theoretical and Experimental Study of a Piezoelectric Pump with Two Elastic Chambers

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