Large field of view MEMS-based confocal laser scanning microscope for fluorescence imaging

Bechtel, Christin; Knobbe, Jens; Grüger, Heinrich; Lakner, Hubert

doi:10.1016/j.ijleo.2013.07.091

Cited by 14 publications

(9 citation statements)

References 18 publications

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“…In previous studies [15][16][17][18][19][20][21][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41], the focus was on developing a specific handler for a specific domain for ATE parallel testing. However, in a situation of existing different domains such as electrostatic, piezoelectric, and piezoresistive, a methodology capable of handling all the domains are required.…”

Section: Methodsmentioning

confidence: 99%

“…The last decade has witnessed an admirable surge for the introduction of diverse general characterizing and testing methods for MEMS devices, some of which are shown in Table 1 [24][25][26][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41]. These methods are categorized into two main groups: destructive and non-destructive testing approaches.…”

Section: Introductionmentioning

confidence: 99%

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A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

2020

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This research explores a new ATE (Automatic Testing Equipment) method for Micro Electro Mechanical Systems (MEMS) devices. In this method, microscale aerodynamic drag force is generated on a movable part of a MEMS sensor from a micronozzle hole located a specific distance above the chip that will result in a measurable change in output. This approach has the potential to be generalized for the characterization of every MEMS device in mass production lines to test the functionality of devices rapidly and characterize important mechanical properties. The most important testing properties include the simultaneous application of controllable and non-invasive manipulative force, a single handler for multi-sensor, and non-contact characterization, which are relatively difficult to find with other contemporary approaches. Here we propose a custom-made sensing platform consisting of a microcantilever array interconnected to a data acquisition device to read the capacitive effects of each cantilever’s deflection caused by air drag force. This platform allows us to empirically prove the functionality and applicability of the proposed characterization method using airflow force stimuli. The results, stimulatingly, exhibited that air force from a hole of 5 µm radii located 25 µm above a 200 × 200 µm2 surface could be focused on a circular spot with radii of approximately 5 µm with surface sweep accuracy of <8 µm. This micro-size airflow jet can be specifically designed to apply airflow force on the MEMS movable component surface. Furthermore, it was shown that the generated air force range could be controlled from 20 nN to 60 nN, approximately, with a linear dependency on airflow ranging from 5 m/s to 20 m/s, which is from a 5 µm radius microhole air jet placed 400 µm above the chip. In this case-study chip, for a microcantilever with a length of 400 µm, the capacitance curve increased linearly from 28.2 pF to 30.5 pF with airflow variation from 5 m/s to 21 m/s from a hole. The resultant curve is representative of a standard curve for testing of the further similar die. Based on these results, this paper paves the way towards the development of a new non-contact, non-invasive, easy-to-operate, reliable, and relatively cheap air-based method for characterizing and testing MEMS sensors.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

2020

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“…In MEMS analysis reported in [93], [52]. Nondestructive Scanning laser microscopy Extended depth-of-focus, abnormal vertical displacements [53]. Nondestructive…”

Section: Issues In Device Level Testingmentioning

confidence: 99%

A Review on Key Issues and Challenges in Devices Level MEMS Testing

et al. 2016

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The present review provides information relevant to issues and challenges in MEMS testing techniques that are implemented to analyze the microelectromechanical systems (MEMS) behavior for specific application and operating conditions. MEMS devices are more complex and extremely diverse due to the immersion of multidomains. Their failure modes are distinctive under different circumstances. Therefore, testing of these systems at device level as well as at mass production level, that is, parallel testing, is becoming very challenging as compared to the IC test, because MEMS respond to electrical, physical, chemical, and optical stimuli. Currently, test systems developed for MEMS devices have to be customized due to their nondeterministic behavior and complexity. The accurate measurement of test systems for MEMS is difficult to quantify in the production phase. The complexity of the device to be tested required maturity in the test technique which increases the cost of test development; this practice is directly imposed on the device cost. This factor causes a delay in time-to-market.

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“…A large field of view (FOV) is always one of the most desirable characteristics for optical systems [ 19 ], such as imaging [ 20 , 21 , 22 ], beam-deflecting [ 23 , 24 ], solar power [ 25 , 26 ], etc. However, the conventional configurations of wide-angle-view optical systems are always achieved via a 3D configuration, such as Luneburg lens [ 27 ] and compound eyes [ 20 , 28 ], leading to bulky and expensive systems.…”

Section: Introductionmentioning

confidence: 99%

Quadratic Meta-Reflectors Made of HfO2 Nanopillars with a Large Field of View at Infrared Wavelengths

Tang

et al. 2020

Nanomaterials

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Metasurfaces, being composed of subwavelength nanostructures, can achieve peculiar optical manipulations of phase, amplitude, etc. A large field of view (FOV) is always one of the most desirable characteristics of optical systems. In this study, metasurface-based quadratic reflectors (i.e., meta-reflectors) made of HfO2 nanopillars are investigated to realize a large FOV at infrared wavelengths. First, the geometrical dependence of HfO2 nanopillars’ phase difference is analyzed to show the general principles of designing infrared HfO2 metasurfaces. Then, two meta-reflectors with a quadratic phase profile are investigated to show their large FOV, subwavelength resolution, and long focal depth. Furthermore, the two quadratic reflectors also show a large FOV when deflecting a laser beam with a deflecting-angle range of approximately ±80°. This study presents a flat optical metamaterial with a large FOV for imaging and deflecting, which can greatly simplify the optical–mechanical complexity of infrared systems, particularly with potential applications in high-power optical systems.

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Large field of view MEMS-based confocal laser scanning microscope for fluorescence imaging

Cited by 14 publications

References 18 publications

A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

A Review on Key Issues and Challenges in Devices Level MEMS Testing

Quadratic Meta-Reflectors Made of HfO2 Nanopillars with a Large Field of View at Infrared Wavelengths

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