2010
DOI: 10.1002/adfm.201000492
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Large‐Area Nanoscale Patterning of Functional Materials by Nanomolding in Capillaries

Abstract: Within the past years there has been much effort in developing and improving new techniques for the nanoscale patterning of functional materials used in promising applications like nano(opto)electronics. Here a high‐resolution soft lithography technique—nanomolding in capillaries (NAMIC)—is demonstrated. Composite PDMS stamps with sub‐100 nm features are fabricated by nanoimprint lithography to yield nanomolds for NAMIC. NAMIC is used to pattern different functional materials such as fluorescent dyes, proteins… Show more

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Cited by 26 publications
(21 citation statements)
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References 38 publications
(39 reference statements)
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“…[ 118 ] Due to the mechanical instability of the soft polymeric stamp, the dimensions of the channels in MIMIC are typically limited to about a few hundred nanometers. [ 119 ] A similar process of patterning a precursor material with MIMIC on a fl exible substrate, and transition into a conductive material after stamp removal, has been reported for graphene oxide. [ 120 ] With a hard PDMS stamp, centimeter-long and large-area 10 μ m wide, ultrathin (1-3 nm) microwires of reduced graphene oxide fl akes (500 nm to 1.5 μ m) have been patterned by MIMIC of graphene oxide in aqueous solution on 3-aminopropyl-triethoxysilane (APTES)-treated substrates (SiO 2 wafer, quartz, and PET), followed by a chemical reduction with hydrazine vapor.…”
Section: Progress Reportmentioning
confidence: 89%
“…[ 118 ] Due to the mechanical instability of the soft polymeric stamp, the dimensions of the channels in MIMIC are typically limited to about a few hundred nanometers. [ 119 ] A similar process of patterning a precursor material with MIMIC on a fl exible substrate, and transition into a conductive material after stamp removal, has been reported for graphene oxide. [ 120 ] With a hard PDMS stamp, centimeter-long and large-area 10 μ m wide, ultrathin (1-3 nm) microwires of reduced graphene oxide fl akes (500 nm to 1.5 μ m) have been patterned by MIMIC of graphene oxide in aqueous solution on 3-aminopropyl-triethoxysilane (APTES)-treated substrates (SiO 2 wafer, quartz, and PET), followed by a chemical reduction with hydrazine vapor.…”
Section: Progress Reportmentioning
confidence: 89%
“…In this context, it is important to push the limit of resolution achieved by MIMIC in order to find its niche in next-generation lithography techniques. For improving the resolution of MIMIC, nanomolding in capillaries was recently introduced using composite PDMS stamps with sub-100 nm channels [47]. It is indeed attractive and cost effective only if the methodology of MIMIC could be somehow modified to produce nanosized features using the microchannels.…”
Section: Modified Micromolding Methodsmentioning
confidence: 99%
“…we proposed a strategy to combine the micro/nano confinement with the materials doping to simultaneously optimize the response time and sensitivity of PEDOT: PSS based resistortype temperature sensor. Low dimension PEDOT: PSS wires from a few micrometers down to sub-100 nm in diameters were fabricated using a low-cost micro/nanoscale printing approach (Gates et al, 2005;Massi et al, 2006;Duan et al, 2010;Tang et al, 2019). Their sensitivity and response time to temperature were compared (Scheme 1).…”
Section: Introductionmentioning
confidence: 99%