Large area ashing process using an atmospheric pressure plasma

Yoo, Seungryul; Lho, T.; Seok, Dong Chan; Hong, Yong Cheol; Lee, Bong Ju

doi:10.1016/j.tsf.2010.11.051

Cited by 4 publications

(6 citation statements)

References 6 publications

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“…[27,28] The Cassie-Baxter model is observed when the roughness is significantly high and the water contact angle is increased, with the increase of surface roughness through the formation of an air pocket between the substrate and the water droplet. The Wenzel model is observed when the surface roughness is not significantly high, and the water contact angle is also increased with the increase of surface area by the following equations.…”

Section: Resultsmentioning

confidence: 99%

“…The Wenzel model is observed when the surface roughness is not significantly high, and the water contact angle is also increased with the increase of surface area by the following equations. [27,28] For a flat surface, the surface tensions are balanced and the stable contact angle of (u c ) is formed by Equation (1):…”

Section: Resultsmentioning

confidence: 99%

“…When the surface is textured, the contact interface is determined by the Cassie–Baxter model or the Wenzel model . The Cassie–Baxter model is observed when the roughness is significantly high and the water contact angle is increased, with the increase of surface roughness through the formation of an air pocket between the substrate and the water droplet.…”

Section: Resultsmentioning

confidence: 99%

“…The Cassie–Baxter model is observed when the roughness is significantly high and the water contact angle is increased, with the increase of surface roughness through the formation of an air pocket between the substrate and the water droplet. The Wenzel model is observed when the surface roughness is not significantly high, and the water contact angle is also increased with the increase of surface area by the following equations . For a flat surface, the surface tensions are balanced and the stable contact angle of (θ c ) is formed by Equation :

A = {normalγ}_{1} - {normalγ}_{12} = {normalγ}_{2} \cos {normalθ}_{normalc}

where A is the adhesion tension, γ 1 is the interface tension on between substrate and the air, γ 12 is the interface tension on between the water droplet and air, γ 2 is the interface tension on between the substrate and the water droplet, and the θ c is the equilibrium contact angle of the water droplet on the substrate.…”

Section: Resultsmentioning

confidence: 99%

“…[27,28] On the polyimide surface, the differences in the adhesion strength, with and without the surface texturing, was investigated by measuring the adhesion force between the polyimide substrate and the Ag ink. spin-coated on the polyimide surfaces using the measurement method shown in Figure 3.…”

Section: Operatingmentioning

confidence: 99%

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Linewidth Control and the Improved Adhesion of Inkjet-Printed Ag on Polyimide Substrate, Textured Using Near-Atmospheric Pressure Plasmas

Mun

Park

Yeom

2016

Plasma Process. Polym.

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In this paper, the effect of polyimide surface modification -using near-atmospheric pressure plasmas -on the line width and adhesion of inkjet-printed Ag was investigated by texturing and modifying the chemical composition of the polyimide surface. The polyimide surface was textured with He/O 2 , to increase the surface area of the polyimide substrate and it increased the water contact angle from 57 to 1378, when the textured polyimide surface was treated with a SF 6 plasma after the texturing process. The textured polyimide surface also exhibited the increased adhesion strength of Ag film (by about two times), due to the increase in the contact area, as expected, according to the Wenzel model. The linewidth of the inkjet-printed Ag line decreased by about ten times from 330 mm (for the flat polyimide surface) to 23 mm (for the textured polyimide surface) in addition to having smoother line edges.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%