Large‐Area 3D Nanostructures with Octagonal Quasicrystalline Symmetry via Phase‐Mask Lithography

Abstract

3D nanostructured quasicrystalline materials significantly larger than feasible with previously reported techniques are produced. 2D quasiperiodic surface relief templates with 8mm point group symmetry are made by multiple‐exposure interference lithography. Phase‐mask lithography with corresponding PDMS masks produce bicontinuous 3D axial quasicrystal SU‐8 structures (see figure).

Three-Dimensionally-Patterned Submicrometer-Scale Hydrogel/Air Networks That Offer a New Platform for Biomedical Applications

“…By flood exposing a thick spincoated photoresist with a collimated beam through a suitably designed phase mask, one can make complex 3D structures over a large area. While the technique is still in an early phase of development, the method has been successfully employed by the Rogers group 29 and Thomas group 30 to fabricate complex 3D periodic and quasi-periodic structures at the submicrometer scale. So far, however, PMIL has been typically performed using commercially available photoresist materials such as SU-8, which is unsuitable for tissue engineering, biosensors, or drug-delivery applications where biocompatibility, functionalization, and drug loading of the materials is essential.…”

Reconfigurable Optically Induced Quasicrystallographic Three‐Dimensional Complex Nonlinear Photonic Lattice Structures

“…In three dimensions, both 3D axial PQCs as well as variants of icosahedral structures have been investigated. [20][21][22][23][24][25] In the case of 3D axial PQCs there is quasiperiodicity in x-y plane while the periodicity remained along z axis. [21,25] However, in mostly reported fabrication of 3D PQCs, either the lattice-forming light wavelength is to be varied or optical components/ setup is to be manipulated with high precision in order to realize 3D PQCs with variable lattice geometry or periodicity between similar structures.…”

“…[21,25] However, in mostly reported fabrication of 3D PQCs, either the lattice-forming light wavelength is to be varied or optical components/ setup is to be manipulated with high precision in order to realize 3D PQCs with variable lattice geometry or periodicity between similar structures. [21][22][23][24][25] Moreover, these approaches mainly involve single or multiple exposure of interfering beams coupled with precisely designed fixed discrete optical elements.…”

“…It has been theoretically proposed that PC structures belonging to all fourteen 3D Bravais lattices could be fabricated either by the interference of multiple beams or by the multiple exposure of two beam interference. [15,16] As implemented in the case of periodic PC structures, recently, various optical induction-based fabrication approaches have been adapted to fabricate 2D [17][18][19] as well as 3D [20][21][22][23][24][25] PQCs in different photosensitive materials. In three dimensions, both 3D axial PQCs as well as variants of icosahedral structures have been investigated.…”

Fabrication of submicron metallic grids with interference and phase-mask holography

“…1(a). 16 The setup consists of a UV microscope objective, spatial filter, and rotational stage with mirror. A linearly polarized light of 364-nm wavelength of a single-mode Ar-ion laser was used for a coherent light source.…”