High temperatures in Solid Oxide Fuel Cells (SOFCs) place stringent requirements on the cell components materials which result in high material costs for interconnects and insulation and cause the degradation of the system. The development of Intermediate Temperature SOFCs (IT-SOFCs) will require electrolyte materials with higher ionic conductivity at moderate temperatures than the conventional yttria-stabilised zirconia (YSZ) [1]. Recently, lanthanum silicates with an apatite-like structure (La 9,33 Si 6 O 26 ) have attracted considerable interest as potential materials for low cost electrolyte [2]. Some of these materials show conductivities at 875 K comparable to, or better than, YSZ; their high level of oxide ion mobility was related to the presence of oxygen channels along the c axis which facilitate the diffusion of the anionic species (O 2-for SOFCs applications) [3]. Another way to fulfil IT-SOFCs requirements is to decrease the electrolyte thickness to the micrometer range and, therefore, the ohmic drop at the electrolyte. Magnetron sputtering has already been used to synthesize thin film electrolytes for SOFCs owing to its versatility for depositing complex materials as well as its ability to control their composition and morphology [4]. The manufacturing of thin film lanthanum silicate electrolytes by magnetron sputtering, with thicknesses in the micrometer range, can be achieved through the previous deposition of La-Si films and subsequent thermal oxidation [5]. The present study focuses on the characterization of the morphological and structural changes upon oxidation of La-Si films deposited by magnetron sputtering.The La-Si films were deposited by magnetron sputtering from pure La and Si targets (200 mm of diameter). The La target power was maintained constant at 1000 W in all depositions whereas the Si target power was varied from 400 to 750 W. All films were deposited on Al 2 O 3 pellets. The substrate bias voltage was kept constant at -50 V. An Ar (99.99%) flow rate of 20 sccm, which resulted in a total pressure of about 0.4 Pa, was used in all experiments. The La-Si films were oxidised at 1175 K for 1 h in industrial air (99.995% purity) flowing through a dehumidificator. The chemical composition of the coatings was determined by electron probe microanalysis (EPMA). The cross section, surface topography and morphological features of the La-Si films were examined on a scanning electron microscope (SEM) equipped with an EDAX energy dispersive spectrometer (EDS). The structure of the coatings was studied by X-ray diffraction (XRD) in Bragg-Brentano configuration with Co(Kα) radiation and by Micro-Raman spectroscopy. Figure 1 shows the surface and cross-section SEM micrographs of a La-Si film deposited with 49 at. % Si after thermal oxidation in industrial air for one hour at 1175 K. Besides the substrate induced features, the film surface is covered by fine grains with angular shapes (compare both halves in figure 1a) which indicate that a crystalline phase was formed as a result of the oxidatio...