Langmuir probe data analysis for a magnetized inductive radio-frequency discharge

Abstract

Articles you may be interested inCriteria of radio-frequency ring-shaped hollow cathode discharge using H2 and Ar gases for plasma processing J. Appl. Phys. 113, 033302 (2013); 10.1063/1.4776220Investigation of magnetic-pole-enhanced inductively coupled nitrogen-argon plasmas J. Appl. Phys. 112, 063305 (2012); 10.1063/1.4754509Analysis of uncompensated Langmuir probe characteristics in radio-frequency discharges revisited Electrostatic probe diagnostics of a planar-type radio-frequency inductively coupled oxygen plasma Diagnostics of inductively amplified magnetron discharges by optical emission, absorption spectroscopy, and Langmuir probe measurementsThe properties of an inductively coupled argon plasma in a uniform magnetic field, at pressures of the order of 0.1 Pa, in the presence of a weak current-free electric double layer, are measured with a plane Langmuir probe. The static current-voltage probe characteristics, recorded on the symmetry axis of the experimental device, both in the plasma source and in the main chamber of the setup, showed the existence of two electron populations with different temperatures. The axial profiles of plasma parameters, such as the plasma potential and the cold and hot electron temperatures, offered a new insight into such a complex system. However, both the external magnetic field and the two electron populations contribute to the difficulty of calculation of the local plasma density. A method for solving this problem, involving the definition of an effective electron temperature, is also presented.

Electron heating and the electrical asymmetry effect in dual-frequency capacitive CF4discharges

“…are the space-dependent densities of CF + 3 , F − and CF − 3 ions in the sheath.ŝ p,g is the maximum of the time-dependent sheath width at the powered and grounded electrode, s p,g (t), calculated according to Brinkmann [88]:…”

Stochastic heating in asymmetric capacitively coupled RF discharges

“…The solid lines in figure 8 are the result of a fluid sheath model [44,45] using experimentally obtained input parameters such as pressure, voltage, electron density and electron temperature. Good agreement between experiment and simulation is found.…”

“…However, from these investigations at low pressures, the nature of this excitation mechanism in terms of electron beams is now obvious. From the slope of the beam trajectory the electron drift velocity In this context the sheath edge is defined according to Brinkmann [45] as spatial position s, where the following condition is fulfilled:…”

“…Figure 14 shows the spatial and temporal evolution of the electric field in the boundary sheath of an asymmetric CCRF discharge at 1 Pa and 8 W in krypton at the powered electrode. The markers correspond to measured fields using FDS and the solid lines to the result of a fluid sheath model [44,45] using experimentally determined input parameters. Good agreement between experiment and theory is found.…”

“…The measured spatio-temporal profiles of the electric field in the sheath are compared with the results of a fluid sheath model [44,45] with experimentally obtained input parameters (pressure, voltage, electron density and electron temperature). The density of electrons above 12 eV is calculated space and time resolved by a hybrid Monte Carlo simulation using the electric fields resulting from the fluid model as input parameters [10,46].…”