Langasite Based Surface Acoustic Wave Sensors for High Temperature Chemical Detection in Harsh Environment

Tortissier, Grégory; Blanc, Laurianne; Tetelin, Angélique; Lachaud, Jean-Luc; Déjous, Corinne; Rebière, Dominique

doi:10.1016/j.proche.2009.07.240

Cited by 8 publications

(4 citation statements)

References 4 publications

(4 reference statements)

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“…Tortissier et al studied the sensor of LGS crystals employed in detecting chemical components in harsh environments. They also evaluated the frequency variation of the retardation line [ 150 ].…”

Section: Applications Of Piezoelectric Nanomaterials At High Temperaturementioning

confidence: 99%

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Piezoelectric Materials: Properties, Advancements, and Design Strategies for High-Temperature Applications

2022

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Piezoelectronics, as an efficient approach for energy conversion and sensing, have a far-reaching influence on energy harvesting, precise instruments, sensing, health monitoring and so on. A majority of the previous works on piezoelectronics concentrated on the materials that are applied at close to room temperatures. However, there is inadequate research on the materials for high-temperature piezoelectric applications, yet they also have important applications in the critical equipment of aeroengines and nuclear reactors in harsh and high-temperature conditions. In this review, we briefly introduce fundamental knowledge about the piezoelectric effect, and emphatically elucidate high-temperature piezoelectrics, involving: the typical piezoelectric materials operated in high temperatures, and the applications, limiting factors, prospects and challenges of piezoelectricity at high temperatures.

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Section: Applications Of Piezoelectric Nanomaterials At High Temperaturementioning

confidence: 99%

“…Reproduced with permission from Ref. [ 150 ] Copyright: 2001 American Institute of Physics. ( f ) Working principle of gas sensor (upper panel).…”

Section: Figurementioning

confidence: 99%

Piezoelectric Materials: Properties, Advancements, and Design Strategies for High-Temperature Applications

2022

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“…Many research teams have worked in developing the SAW sensor arrays for simultaneous detection of chemicals [ 95 , 130 , 138 , 139 , 143 , 144 , 145 ]. Advances have been made to operate the sensors at high temperatures and harsh environments as well [ 29 , 146 , 147 , 148 , 149 ]. Table 2 lists some SAW sensors from the literature for detection of various gases or chemical vapors at different conditions.…”

Section: Advances In Saw-based Chemical Sensingmentioning

confidence: 99%

SAW Sensors for Chemical Vapors and Gases

Devkota

Ohodnicki

Greve

2017

Sensors

220

147

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Surface acoustic wave (SAW) technology provides a sensitive platform for sensing chemicals in gaseous and fluidic states with the inherent advantages of passive and wireless operation. In this review, we provide a general overview on the fundamental aspects and some major advances of Rayleigh wave-based SAW sensors in sensing chemicals in a gaseous phase. In particular, we review the progress in general understanding of the SAW chemical sensing mechanism, optimization of the sensor characteristics, and the development of the sensors operational at different conditions. Based on previous publications, we suggest some appropriate sensing approaches for particular applications and identify new opportunities and needs for additional research in this area moving into the future.

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“…There are many materials that exhibit outstanding SAW characteristics at room temperature and were listed in Section 4.2. Langasite has been in the forefront of research for high temperature SAW materials because of its piezoelectric stability up to 1473 • C [55][56][57][58][59][60][61][62][63][64]. However, langasite exhibits large acoustic propagation losses at high temper- atures that increase with frequency, making it unsuitable for devices operating at high temperatures and high frequencies.…”

Section: Gan Based Saw Devices For High Temperature Applicationsmentioning

confidence: 99%

Group III-nitride devices and applications

Justice¹

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The group III-nitride system of materials has had considerable commercial success in recent years in the solid state lighting (SSL) and power electronics markets. The need for high efficient general lighting applications has driven research into InGaN based blue light emitting diodes (LEDs), and demand for more efficient power electronics for telecommunications has driven research into AlGaN based high electron mobility transistors (HEMTs). However, the group III-nitrides material properties make them attractive for several other applications that have not received as much attention. This work focuses on developing group III-nitride based devices for novel applications. GaN is a robust, chemically inert, piezoelectric material, making it an ideal candidate for surface acoustic wave (SAW) devices designed for high temperature and/or harsh environment sensors. In this work, SAW devices based on GaN are developed for use in high temperature gas or chemical sensor applications. To increase device sensitivity, while maintaining a simple one-step photolithography fabrication process, devices were designed to operate at high harmonic frequencies. This allows for GHz regime operation without sub-micron fabrication. One potential market for this technology is continuous emissions monitoring of combustion gas vehicles. In addition to SAW devices, high electron mobility transistors (HEMTs) were developed. The epitaxial structure was characterized and the 2-D electron gas concentrations were simulated and compared to experimental results. Device fabrication processes were developed and are outlined. Fabricated devices were electrically measured and device performance is discussed. Above all, I would like to thank my wife, Jackie, whose patience, loving support, and commitment to our family allowed me to pursue this degree. She deserves as much, if not more credit for her willingness to leave all her family and friends behind in San Diego, move to Morgantown, WV with me, and raise our son while I attended school. I would like to thank my son, Joshua, who even at a young age, showed interest and enthusiasm in my work. His questions helped me think about this work in ways I would not have otherwise. I would like to thank my advisor, Dr. Dimitris Korakakis, for taking the chance, and giving me the opportunity to conduct this research. His time, discussions, guidance and mentoring were invaluable. Not only for progressing this work, but for helping me establish a fundamental skill set and a confidence in my abilities that will allow me to be successful in my career far beyond grad school. I would like to thank the committee members, Dr. Larry Hornak and Dr. Jeremy Dawson. Both of whom made themselves available and were always willing to help when I had questions. Specifically, Dr. Hornak's help in device design to suppress the electromagnetic feedthrough of the SAW devices and Dr. Dawson's help in optimizing the fabrication processes in the cleanroom.

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Langasite Based Surface Acoustic Wave Sensors for High Temperature Chemical Detection in Harsh Environment

Cited by 8 publications

References 4 publications

Piezoelectric Materials: Properties, Advancements, and Design Strategies for High-Temperature Applications

Piezoelectric Materials: Properties, Advancements, and Design Strategies for High-Temperature Applications

SAW Sensors for Chemical Vapors and Gases

Group III-nitride devices and applications

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