Laminated Air Structured and Fluid Infiltrated Polymer Waveguides

Zeller, Eike; Bennet, Francis; Neshev, Dragomir N.; Mitchell, Arnan

doi:10.1109/lpt.2011.2164396

Cited by 2 publications

(1 citation statement)

References 12 publications

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“…Transferring and bonding of uncrosslinked SU-8 onto SU-8 microchannels has been shown [19,20,[26][27][28] down to a film thickness of approximately 5 μm [28]. To exploit a bonding method not only for microfluidic but also for optical applications and hence for optofluidics, it was predicted that the negative tone epoxybased photoresist KMPR could be used due to the lower refractive index compared to SU-8 [29]. Bonding of KMPR layers onto KMPR channels was achieved using a conformal adsorbate film and PDMS [30].…”

Section: Introductionmentioning

confidence: 99%

Bonding of SU-8 films onto KMPR structures for microfluidic, air-suspended photonic and optofluidic applications

Prokop

Schoenhardt

Mahmud

et al. 2016

J. Micromech. Microeng.

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We present a method to bond unstructured and structured SU-8 films down to sub-micron thicknesses onto microchannels fabricated in KMPR using a flexible polydimethylsiloxane (PDMS) stamp. By exploiting differently casted PDMS stamps, 3D microfluidic channel networks, air-suspended photonic devices and optofluidic structures have been fabricated. First, microchannels of KMPR are patterned by photolithography and an SU-8 film is spin coated onto a prepared PDMS stamp. The stamp is then placed on top of the KMPR microchannels and the SU-8 layer is cross-linked by applying sufficient heat and pressure. After peeling off the PDMS stamp, the SU-8 layer remains bonded on the KMPR. In our experiments, we demonstrate the bonding of approximately 0.5 μm thick structured SU-8 films onto KMPR microchannels of about 500 μm width and 25 μm height. Bond strength tests demonstrated that such thin layers can withstand pressures up to 1100 hPa. The laminated SU-8 layers can enable various functionalities, e.g. sealing of microfluidic channels, realization of air-suspended photonic structures or optofluidic devices. Most importantly, the combination of fluid handling in the microchannels and air-suspended photonic structures realized in the laminated SU-8 layer enables research towards a large range of applications, such as optofluidics, biosensors, chemical and biomedical analysis, environmental investigations, and renewable energy.

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Section: Introductionmentioning

confidence: 99%

Bonding of SU-8 films onto KMPR structures for microfluidic, air-suspended photonic and optofluidic applications

Prokop

Schoenhardt

Mahmud

et al. 2016

J. Micromech. Microeng.

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Fluid tunable transition from trapping to discrete diffraction in waveguide arrays

Zeller¹,

Devendra²,

Nguyen³

et al. 2013

Opt. Express

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We report on the fluid tunable transition from trapping to discrete diffraction in planar polymer waveguide arrays. A novel optofluidic polymer waveguide array platform was engineered to allow a wavelength dependent transition from a localised state where light is trapped in a defect mode to delocalised state where light is spreading through discrete diffraction. The spectral location of this transition can be controlled through a variation of the fluid's refractive index. The platform is compatible with aqueous solutions, making it an interesting candidate for an integrated refractive index sensor to perform label-free biosensing.

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Laminated Air Structured and Fluid Infiltrated Polymer Waveguides

Cited by 2 publications

References 12 publications

Bonding of SU-8 films onto KMPR structures for microfluidic, air-suspended photonic and optofluidic applications

Bonding of SU-8 films onto KMPR structures for microfluidic, air-suspended photonic and optofluidic applications

Fluid tunable transition from trapping to discrete diffraction in waveguide arrays

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