LaF3 electrolyte-insulator-semiconductor sensor for detecting fluoride ions

Cho, Hyeonsu; Kim, Kihyun; Meyyappan, M.; Baek, Chang‐Ki

doi:10.1016/j.snb.2018.09.094

Cited by 30 publications

(13 citation statements)

References 22 publications

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“…These problems can be overcome by using ion-sensitive inorganic materials, which can be deposited onto the gate surface by thin-film deposition techniques, being compatible with semiconductor technology and, therefore, with the EIS fabrication. For example, a fluoride (F − )-selective EIS sensor was developed by the thermal deposition of polycrystalline lanthanum fluoride (LaF 3 ) films on the SiO 2 gate surface [ 72 ]. The sensor exhibited a high sensitivity of 52.3 mV/pF in the F − -ion concentration range of 10 −2 –10 −6 M, a relatively low hysteresis (5.1 mV), and a small drift (0.67 mV/h).…”

Section: Chemical Sensors and Biosensors Based On Capacitive Eis Smentioning

confidence: 99%

Capacitive Field-Effect EIS Chemical Sensors and Biosensors: A Status Report

Poghossian¹,

Schöning

2020

Sensors

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Electrolyte-insulator-semiconductor (EIS) field-effect sensors belong to a new generation of electronic chips for biochemical sensing, enabling a direct electronic readout. The review gives an overview on recent advances and current trends in the research and development of chemical sensors and biosensors based on the capacitive field-effect EIS structure—the simplest field-effect device, which represents a biochemically sensitive capacitor. Fundamental concepts, physicochemical phenomena underlying the transduction mechanism and application of capacitive EIS sensors for the detection of pH, ion concentrations, and enzymatic reactions, as well as the label-free detection of charged molecules (nucleic acids, proteins, and polyelectrolytes) and nanoparticles, are presented and discussed.

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Section: Chemical Sensors and Biosensors Based On Capacitive Eis Smentioning

confidence: 99%

Capacitive Field-Effect EIS Chemical Sensors and Biosensors: A Status Report

Poghossian¹,

Schöning

2020

Sensors

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“…Electrolyte-insulator-semiconductor capacitors (EISCAPs) represent biochemically sensitive capacitors, belonging to the family of field-effect-based chemical sensors and biosensors, with simple layout, easy and low-cost fabrication. EISCAPs have been widely used not only for the detection of different analytes (pH, [1,2] ions, [3,4] charged macromolecules, [5,6] bionanoparticles, [7,8] ligand-stabilized nanoparticles, [9] biomarkers [10,11] as well as for enzymatic reactions [12][13][14][15] ) but also for studying biomolecular logic operations [16][17][18] and new sensitive materials (see, e.g., recent review [19] and references therein). Results achieved with EISCAPs are typically transferable to other kinds of field-effect sensors, like ionsensitive field-effect transistors (ISFET), Si nanowire transistors, or light-addressable potentiometric sensors.…”

Section: Introductionmentioning

confidence: 99%

Miniaturized pH‐Sensitive Field‐Effect Capacitors with Ultrathin Ta₂O₅Films Prepared by Atomic Layer Deposition

Molinnus

Iken

Johnen

et al. 2022

Physica Status Solidi (a)

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Miniaturized electrolyte–insulator–semiconductor capacitors (EISCAPs) with ultrathin gate insulators have been studied in terms of their pH‐sensitive sensor characteristics: three different EISCAP systems consisting of Al–p‐Si–Ta2O5(5 nm), Al–p‐Si–Si3N4(1 or 2 nm)–Ta2O5 (5 nm), and Al–p‐Si–SiO2(3.6 nm)–Ta2O5(5 nm) layer structures are characterized in buffer solution with different pH values by means of capacitance–voltage and constant capacitance method. The SiO2 and Si3N4 gate insulators are deposited by rapid thermal oxidation and rapid thermal nitridation, respectively, whereas the Ta2O5 film is prepared by atomic layer deposition. All EISCAP systems have a clear pH response, favoring the stacked gate insulators SiO2–Ta2O5 when considering the overall sensor characteristics, while the Si3N4(1 nm)–Ta2O5 stack delivers the largest accumulation capacitance (due to the lower equivalent oxide thickness) and a higher steepness in the slope of the capacitance–voltage curve among the studied stacked gate insulator systems.

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“…The overall capacitance of the CG-EISCAP chip or the single EISCAP will also increase, resulting in a shift of the C-V curve in the direction of more positive (less negative) gate voltages (Figure 7, red curve). Such shifts of the C-V curve along the voltage axis upon biochemical interaction was observed in many experiments on conventional single EISCAP-based pH sensors or biosensors (e.g., [17,19,20,24,26]). Often, these sensors work in the ConCap mode, by which gatesurface potential shifts induced upon biochemical interactions can directly be determined from the dynamic sensor response (see [15] and references therein).…”

Section: Simulation Resultsmentioning

confidence: 59%

“…At the same time, the results achieved with EISCAPs are fully transferable to other EG-FEDs, thereby circumventing the need for fabrication of complicated transistor structures. At present, a lot of single EISCAP sensors modified with particular recognition elements have been developed and successfully proved for the detection of pH [16], concentration of ions [17], enzyme-substrate reactions [18][19][20][21], charged biomolecules (nucleic acids, proteins, biomarkers, nanoparticle/molecule hybrids) [22][23][24][25][26][27][28][29], plant virus particles [30], as well as for realizing biomolecular logic gates [31][32][33]. For recent progress in research and development of chemical sensors and biosensors based on EISCAPs, see [15].…”

Section: Introductionmentioning

confidence: 99%

An Array of On-Chip Integrated, Individually Addressable Capacitive Field-Effect Sensors with Control Gate: Design and Modelling

Poghossian¹,

Welden

Buniatyan

et al. 2021

Sensors

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The on-chip integration of multiple biochemical sensors based on field-effect electrolyte-insulator-semiconductor capacitors (EISCAP) is challenging due to technological difficulties in realization of electrically isolated EISCAPs on the same Si chip. In this work, we present a new simple design for an array of on-chip integrated, individually electrically addressable EISCAPs with an additional control gate (CG-EISCAP). The existence of the CG enables an addressable activation or deactivation of on-chip integrated individual CG-EISCAPs by simple electrical switching the CG of each sensor in various setups, and makes the new design capable for multianalyte detection without cross-talk effects between the sensors in the array. The new designed CG-EISCAP chip was modelled in so-called floating/short-circuited and floating/capacitively-coupled setups, and the corresponding electrical equivalent circuits were developed. In addition, the capacitance-voltage curves of the CG-EISCAP chip in different setups were simulated and compared with that of a single EISCAP sensor. Moreover, the sensitivity of the CG-EISCAP chip to surface potential changes induced by biochemical reactions was simulated and an impact of different parameters, such as gate voltage, insulator thickness and doping concentration in Si, on the sensitivity has been discussed.

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LaF3 electrolyte-insulator-semiconductor sensor for detecting fluoride ions

Cited by 30 publications

References 22 publications

Capacitive Field-Effect EIS Chemical Sensors and Biosensors: A Status Report

Capacitive Field-Effect EIS Chemical Sensors and Biosensors: A Status Report

Miniaturized pH‐Sensitive Field‐Effect Capacitors with Ultrathin Ta₂O₅Films Prepared by Atomic Layer Deposition

An Array of On-Chip Integrated, Individually Addressable Capacitive Field-Effect Sensors with Control Gate: Design and Modelling

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LaF3 electrolyte-insulator-semiconductor sensor for detecting fluoride ions

Cited by 30 publications

References 22 publications

Capacitive Field-Effect EIS Chemical Sensors and Biosensors: A Status Report

Capacitive Field-Effect EIS Chemical Sensors and Biosensors: A Status Report

Miniaturized pH‐Sensitive Field‐Effect Capacitors with Ultrathin Ta2O5Films Prepared by Atomic Layer Deposition

An Array of On-Chip Integrated, Individually Addressable Capacitive Field-Effect Sensors with Control Gate: Design and Modelling

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Miniaturized pH‐Sensitive Field‐Effect Capacitors with Ultrathin Ta₂O₅Films Prepared by Atomic Layer Deposition